纳米线双电层晶体管及其气体传感应用研究

项目名称： 纳米线双电层晶体管及其气体传感应用研究

项目编号： No.51502131

项目类型： 青年科学基金项目

立项/批准年度： 2016

项目学科： 一般工业技术

项目作者： 丰平

作者单位： 南京大学

项目金额： 21万元

中文摘要： 双电层静电调控能有效调节半导体中的载流子浓度，从而观察到新的物理/化学现象。同时，半导体纳米线具有比表面积大的特点，其电学性质对表面吸附/脱附很敏感。本项目基于双电层静电调控研究纳米线晶体管的传感特性，利用SiO2电解质离子栅介质电容大和能实现侧向耦合等特点，研究大电容和多栅极调控下ZnO和SnO2纳米线的气体传感性能。首先，我们拟用微加工工艺制备纳米线双电层晶体管，研究双电层大电容调控下其工作电流、阈值电压和亚阈值摆幅等随气体浓度变化的规律。其次，我们将研制具有多个栅电极的纳米线晶体管传感器，利用这些栅极对纳米线进行调控时的权重不同，用模式识别等方法研究多栅极调控下纳米线的传感性能。本项目的开展对促进纳米线双电层晶体管在超敏感探测等方面的应用具有重要价值。

中文关键词： 纳米线；双电层；气体传感器

英文摘要： Electric-double-layer electrostatic modulation can be used to effectively tune the carrier concentration of a semiconductor, resulting in the observation of novel physical/chemical phenomena. At the same time, the electrical properties of semiconductor nanowires are very sensitive to surface adsorption/desorption conditions due to their high surface-to-volume ratio. In this project, we will investigate the gas sensing properties of ZnO and SnO2 nanowires by using SiO2 electrolyte dielectrics on the basis of the large specific capacitance and lateral coupling characteristics of electric-double-layer electrostatic modulation. At first, we will fabricate nanowire electrical-double-layer transistors by using microfabrication technology and investigate their ON current, threshold voltage and sub-threshold swing characteristics in response to the change of gas concentrations. Secondly, we will fabricate nanowire transistors which have several gates and investigate the multi-gate sensing properties of the nanowires based on the weight difference of these gates by using pattern recognition. The present project will facilitate the application of nanowire electrical-double-layer transistors in high-performance gas sensing.

英文关键词： Nanowire;Electric Double Layer;Gas Sensor