大径厚比光学元件低应力夹持多因素耦合作用机理及实验研究

项目名称： 大径厚比光学元件低应力夹持多因素耦合作用机理及实验研究

项目编号： No.51205087

项目类型： 青年科学基金项目

立项/批准年度： 2013

项目学科： 机械工程学科

项目作者： 刘海涛

作者单位： 哈尔滨工业大学

项目金额： 25万元

中文摘要： 大径厚比光学元件的低应力夹持技术是制约我国惯性约束核聚（ICF）装置输出能量和运行效率提高的关键技术之一。本项目对接触表面微观特性进行研究，建立基于接触表面/亚表面残余应力、裂纹及微观缺陷的多尺度接触理论模型，分析晶体和晶体框接触时残余应力、裂纹及微观缺陷的相互影响规律，及其对接触力和接触特性的影响规律；结合实验和测试技术，研究基于接触区域微观形貌的KDP晶体与晶体框之间相互作用机理，分析局部接触状态下晶体面形精度的影响规律；研究夹持系统动态特性及KDP晶体与晶体框动态相互作用机理，分析动态条件下应力耦合作用机理对KDP晶体面形精度的影响规律；结合有限元分析技术，归纳夹持支撑设计原则和晶体表面面形误差评价标准，建立大径厚比光学元件低应力夹持的设计理论。这对于光学元件低应力夹持技术和表面接触理论的发展和应用均具有重要意义。

中文关键词： 低应力夹持；多因素耦合；多尺度接触；超精密加工；KDP 晶体

英文摘要： Clamping in low stress of optical elements with high radius-thickness ratio is one of the key technologies which restrict the efficiency and energy-output of ICF equipment in China. This paper studies microscopic characteristics of contact area, and develops a theoretical model of multiscale contact based on residual stress and crack as well as micro-defects in interface/sub-surface; Meanwhile, we analyse influencing factors of residual stress and crack & micro-defects of interface between crystal and crystal frame parts, and study its influence to contact force and contact property; A mathematical model is established based on deformation of crystal frame parts in residual stress; Accordingly, it enhances secular stability of the accuracy of crystal frame parts; Combining with experiment and texting technology, an interactional mechanism between KDP crystal and crystal frame is researched based on micro-topography in interface, and analyse influence factors of the surface accuracy of crystal in partial contact; Dynamic performance of clamping system and dynamic interactional mechanism between KDP crystal and crystal frame are also researched, analyse influence factors of the surface accuracy of crystal in dynamic stress coupling; Combining with FEA technology, design principles of clamping and evaluation criter

英文关键词： clamping in low stress；multifactor coupling；multi-scale contact；ultra-precision machining；KDP crystal