CMOS多通道荧光分析阵列传感芯片的设计与研究

项目名称： CMOS多通道荧光分析阵列传感芯片的设计与研究

项目编号： No.61306090

项目类型： 青年科学基金项目

立项/批准年度： 2014

项目学科： 无线电电子学、电信技术

项目作者： 施朝霞

作者单位： 浙江工业大学

项目金额： 25万元

中文摘要： 本项目研究CMOS单片集成的荧光分析阵列传感器，片上集成了光电传感阵列、CTIA有源像素放大电路、异步时序控制电路、CDS自校正电路、差分放大电路和工艺延伸SU-8微反应池。光敏传感二极管采用低漏电流、宽光谱响应的双结深PN结并联新结构，并设计了对微弱荧光有高灵敏度的CTIA有源像素读出电路，它比3T像素电路具有更高的灵敏度和更好的线性度。采用厚SU-8胶工艺形成了两路片上微反应池，每个池中设计了四通道CTIA有源像素阵列，采用异步数字时序和分时多路输出控制读取四通道荧光衰减过程中各时序的荧光强度信号电压。设计的CDS自校正和差分放大电路可消除荧光测试时背景噪声和电路固定模式噪声的影响，提高测试的精度。本项目采用脉冲激光和异步时序控制实现了无滤光片直接式荧光检测。本项目在荧光分析阵列传感器的器件新结构、微弱光电流转换和传感系统单片集成方面有创新之处。可应用于生物医学、食品安全和环境监测。

中文关键词： 荧光传感；光电模型；暗电流；CTIA；集成芯片

英文摘要： This research presents a monolithic integrated CMOS microarray sensor with optical sensing array,CTIA-based in pixel amplication circuits, asynchronous sequence circuits, CDS self-correcting circuits, differential amplifing circucits and CMOS extend SU-8 micro-reaction tank process, for fluorescence detection. A new diode structure of double PN junction in parallel is used,it can be operated as a potodiode with low leakage current and broad spectrum response,also,a CTIA active pixel circuit with high sensitivity for weak fluorescence is designed,the CTIA acctive pixel circuit possesses higher sensitivity and better linearity than 3T active pixel circuit. The thick SU-8 photoresist process is used to form two micro-active tanks, in each tank,it includes four-channel CTIA active pixel array, with asynchronous sequential logic circuits and multi-channel sequencing output control circuits,we can get the fluorescence intensty signal voltage during the flourescence decay process. The CDS self-correcting and differential amplification circuits can elimiate the background noise and fixed pattern noise during fluorescence detection, and improve the testing accuracy.This project realises filterless contacting fluorescence detection based on pulsed laser and asynchronous sequential control circuits. The innovation of this

英文关键词： ；；dark current；CTIA；IC chip