WO3外延薄膜的气敏性能研究

项目名称： WO3外延薄膜的气敏性能研究

项目编号： No.51502186

项目类型： 青年科学基金项目

立项/批准年度： 2016

项目学科： 一般工业技术

项目作者： 赵蒙

作者单位： 苏州科技大学

项目金额： 21万元

中文摘要： WO3外延薄膜的晶相、外露晶面及纵向晶粒尺寸可精确控制，且具有比表面积大、热稳定性好等优点，是极具潜力的气敏材料。本项目拟针对WO3外延薄膜开展如下研究：（1）用激光分子束外延在不同取向的LaAlO3、SrTiO3、Al2O3单晶衬底上制备具有特定晶相和晶面的WO3外延薄膜，结合结构表征、物性测量、第一性原理计算以及气敏性能测试，研究晶相、外露晶面及膜厚等参数对气敏性能的影响，（2）在WO3外延薄膜表面修饰NiO、SnO2、Pd等材料，探究p-n、n-n及金属-氧化物异质结对气敏性能的调控作用，（3）开展气敏性能长期稳定性测试，利用结构表征手段，揭示薄膜微结构变化与传感器稳定性的关联，探索提高稳定性的方法。本项目以WO3外延薄膜为研究对象，探究晶相、晶面及异质结对气敏性能的调控作用，为氧化物气敏材料的研究工作提供了新思路。此外，气敏性能稳定性研究也可为开发实用的氧化物气敏元件提供借鉴。

中文关键词： 金属氧化物薄膜；外延薄膜；气体传感器；气敏性能；微结构调控

英文摘要： The crystalline phase, exposed lattice plane and vertical grain size of epitaxial WO3 thin films are precisely controllable. The films exhibit the advantages of having large specific surface areas and high thermal stability, and hence are considered to be promising candidates for gas sensing applications. This proposed project is aimed at studying epitaxial WO3 films, with the focus putting on the following aspects:(1) using laser molecular beam epitaxy to grow epitaxial WO3 films of specific crystalline phases and preferred crystal orientations deposited on single crystal LaAlO3, SrTiO3 and Al2O3 substrates of different crystal orientations; and combining the results of structural characterization, material property measurements, first principle calculation and gas sensing property measurements to investigate the influences of crystalline phase, exposed lattice plane and film thickness on the gas sensing properties of the films,(2) adding decorative materials, like NiO, SnO2 and Pd, on the epitaxial WO3 film surfaces to see how the gas sensing properties of the films are modulated by the formation of the p-n, n-n and metal-oxide heterojunctions,(3) carrying out long-term gas sensing stability tests of the film samples in order to reveal how the results are associated with the change in the microstructure of the films, and hence to seek possible solution for improving the gas sensing stability. This project, primarily using epitaxial WO3 films as the object for investigating the modulation effects of crystalline phase, lattice plane and heterostructure on their gas sensing properties, will provide new ideas for oxide-based gas sensor research. In addition, the study on gas sensing stability will provide references for pursing practically useable oxide-based gas sensors.

英文关键词： metal oxide film;epitaxy film;gas sensor;gas sensing properties;microstructure control