用于可控纳米制备的高活性、多组分等离子体中的基本过程与特性

项目名称： 用于可控纳米制备的高活性、多组分等离子体中的基本过程与特性

项目编号： No.11275051

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 数理科学和化学

项目作者： 吴嘉达

作者单位： 复旦大学

项目金额： 80万元

中文摘要： 以连续的微波放电、正常辉光放电或反常辉光放电为连续激励手段，脉冲激光烧蚀为脉冲激励手段，通过连续气体放电（CGD）和脉冲激光烧蚀（PLA）的共同作用这一双源激励手段，引发高激发度、高化学活性和多组分的CGD-PLA等离子体；以时空分辨的等离子体光谱测量和分析方法结合理论模拟和光谱拟合，研究CGD-PLA等离子体的基本过程和特性，包括瞬态PLA等离子体在均匀连续的CGD等离子体中的高速膨胀和两等离子体粒子之间的碰撞、激发、电离等过程以及所导致的CGD-PLA等离子体的高激发、高活性等特性；研究作为等离子体边界的材料表面附近CGD-PLA等离子体的鞘层特性和对材料表面的作用过程和机理；通过对气相等离子体粒子的探测识别，探讨发生在CGD-PLA等离子体中的气相反应；在此基础上摸索这类等离子体在纳米材料制备上的应用，了解等离子体特性对材料成分、形貌、结构的影响，并探讨纳米材料可控制备的可行性。

中文关键词： 等离子体；多源激励；激发增强；等离子体应用；材料制备

英文摘要： Using continuous microwave discharge, normal glow discharge or abnormal glow discharge as the approaches of continuous excitation, and pulsed laser ablation as the approach of pulsed excitation, the proposed project will address the study on highly excited, highly reactive and multi-component continuous gas discharge-pulsed laser ablation (CGD-PLA) plasmas ignited by means of the co-action of continuous gas discharge (CGD) and pulsed laser ablation (PLA). The primary processes and characteristics of the CGD-PLA plasma will be studied in the project through the measurement and analysis of plasma optical emission with spatial and temporal resolusion combined with computer simulation and spectrum fitting, including the rapid expansion of the transient PLA plasma in the uniform and continuous CGD plasma, the collision, excitation and ionization processes of the particles in the the CGD plasma and the PLA plasma, the formation of the CGD-PLA plasma as well as the characteristis of the CGD-PLA plasma such as high excitation and high reactivity. As the plasma boundary, the sheath of the CGD-PLA plasma near the surface of a sample workpiece will be addressed in the project including the sheath features and their influences on the sample surface as well as the related mechanisms. The gas phase reactions occurred in the C

英文关键词： plasma；multi-source excitation；excitation enhancement；plasma application；materials fabrication