项目名称: 大气压脉冲射频放电中斑图特性和斑图-辉光转化研究
项目编号: No.11475040
项目类型: 面上项目
立项/批准年度: 2015
项目学科: 数理科学和化学
项目作者: 丁振峰
作者单位: 大连理工大学
项目金额: 75万元
中文摘要: 大气压脉冲射频放电是一种具有优势的等离子体技术,它不仅具有大气压连续波射频放电的优点,又克服了连续波射频大气压放电中气体温度高的缺点。但是,大气压脉冲射频放电产生了不期望的斑图-辉光转变。本项目拟通过二维流体数值模拟和实验研究,弄清大气压脉冲射频的斑图产生机理,各种放电参数、条件对斑图-辉光转变的影响规律;研究化学活性气体脉冲射频放电中的斑图、辉光转变特性,探索无斑图的完全辉光放电放电方法。项目研究不仅能加深、拓宽对射频等离子体放电物理、等离子体斑图的知识和理解,还能提供一种气体温度低、均匀、高活性的大气压脉冲射频放电技术。
中文关键词: 非平衡等离子体;大气压等离子体;低温等离子体
英文摘要: The atmospheric pressure pulsed RF discharge is advantageous over other plasma technologies. It not only has the advantages of the atmospheric pressure continuous-wave RF discharge, but also overcomes the disadvantage of the relatively high gas temperature of the atmospheric pressure continuous wave RF discharge. However, the atmospheric pressure pulsed RF discharge results in the unexpected transition of pattern-glow mode. The project intends to clarify the forming mechanism of pattern and influences of various of discharge parameters and conditions on the transition between pattern- glow mode, and to explore approaches to achieve the patter-free complete glow discharge. The project not only make contribution to deepen and broaden understandings about RF physics and pattern in plasmas, but also provides atmospheric pressure pulsed RF discharge with advantages of lower gas temperature, uniform and high chemically activity.
英文关键词: non-equilibrium plasma;atmospheric pressure plasma;low temperature plasma