多元透明导电氧化物薄膜光电性能的机理研究

项目名称： 多元透明导电氧化物薄膜光电性能的机理研究

项目编号： No.50872048

项目类型： 面上项目

立项/批准年度： 2009

项目学科： 金属学与金属工艺

项目作者： 周艳文

作者单位： 辽宁科技大学

项目金额： 32万元

中文摘要： 锡掺杂氧化铟(ITO)以其优良的电性能在光伏电池的实际应用中使用，但由于铟的贮量低，这种薄膜的造价很高，且其透光率和稳定性不及很多其它氧化物。最近铝掺氧化锌以其良好的透光及稳定性成为研究热点，但其导电性始终不及ITO。几种氧化物的混合薄膜制备成为研究者开发具有良好光电性能氧化物薄膜的又一途径，但多数研究还局限于薄膜的制备及性能分析。对几种氧化物混合形成透明导电氧化物（TCO）薄膜成份、结构及光、电性能等关系的基理方面研究还鲜有报导。本项目将利用粉末靶的优势，对除氧化铟外常用的锌、锡、镉氧化物混合，大范围地改变混合成份，用粉末靶脉冲磁控溅射法制备T薄膜。因为此方法可廉价地获得成份可变的靶体，且其等离子体高能、稳定。研究所制备的薄膜成份、结构、性能间的内在关系，建立关系模型，并深入探讨此关系的内在机理。另外，项目将初步涉及对p-型掺杂氧化铜TCO薄膜的研究，开发TCO家族的新成员.

中文关键词： 透明导电氧化物薄膜；光电性能；射频磁控溅射；粉末靶；封闭非平衡磁场

英文摘要： Tin doped indium oxide (ITO) has been used in photovoltic industry due to its high conductivity. The storage of indium oxide is rare and therefore, very expensive. Also, the transparency of ITO films is not stable compare to those of other oxide films. Due to its high transparency and stability, aluminium doped zinc oxide (AZO) films has been considered to be the substitute of ITO recently, but the conductivity of AZO is lower. Several oxides mixed together may be another approach to prepare multi-component oxide films with high transparency and conductivity. Most reports on multi-component oxide films till now were about their properties. There is no report on the relationship of composition, structure and optical, electrical properties and the mechanism. In this project, zinc oxide, tin oxide and cadmium oxide powder are chosen, the mixed composition will be adjusted from 0 to 100%, two or three of them will be mixed together. Then, the mixed powder as targets, will be used in RF magnetron sputtering to prepare the multi-component trnasparency conductive oxide (TCO) films. The compositions, structures and properties of the oxide films will be analyzed and the relationship and effect mechanism will be studied. In addition, p-type CuAlO2 films will be studies as well.

英文关键词： TCO film; Optical and electrical propertu; RF magnetron sputtering; Powder target; Closed-field unbalanced magnetron