柔性氧化锌基透明导电薄膜的光、电、力学性能调控

项目名称： 柔性氧化锌基透明导电薄膜的光、电、力学性能调控

项目编号： No.61204073

项目类型： 青年科学基金项目

立项/批准年度： 2013

项目学科： 信息四处

项目作者： 吴永庆

作者单位： 中国科学院上海硅酸盐研究所

项目金额： 26万元

中文摘要： 柔性氧化锌基透明导电薄膜因其具有资源丰富、成本低廉、绿色环保等特性，成为柔性透明导电薄膜的发展趋势，目前仅有较少柔性ZnO基薄膜的研究报道，且存在光电性能不高、力学性能差和稳定性低等关键问题，阻碍了柔性ZnO基薄膜的实用化进程。本项目拟从导电靶材制备、多元素掺杂、复合膜系设计、衬底表面改性等方面出发，采用直流磁控溅射方法制备高质量、低成本柔性ZnO基透明导电薄膜。利用液相法和喷雾造粒技术，制备高致密度、微结构均匀的ZnO陶瓷靶材；研究不同衬底对薄膜结构、性能的影响；通过稀土元素和高价位差元素掺杂，调控薄膜的光电性能，获得"微观结构-导电机制-光电性能"的本征关系；设计新型电介质/金属/电介质多层膜结构，提高薄膜的光电性能和稳定性；采用等离子体预处理和沉积籽晶缓冲层等手段，提高薄膜与柔性衬底之间的附着力。本项目能够为柔性氧化锌基薄膜的产业化应用提供基础数据和理论指导。

中文关键词： 氧化锌；柔性透明导电薄膜；透过率；电导率；结合力

英文摘要： Resource-rich, low-cost, environment-friendly ZnO based flexible transparent conductive film has excellent optical performance, which represents the development trend of flexible transparent conductive films. Until now, the studies on flexible ZnO based films are rather limited and moreover, the photoelectric performance, mechanical properties, and stability of currently studied flexible ZnO films are quite poor. Starting from aspects of the target preparation, element doping, film design, pretreatment of substrate, and seeded buffer layer control, the purpose of this project is (1) to prepare high quality low-cost transparent conductive ZnO thin films using the DC magnetron sputtering method; (2) to prepare high density ZnO ceramic target with uniform microstructure using liquid and spray granulation technique, (3) to study the effects of different substrates on the microstructure and photoelectric properties, (4) to modulate the photoelectric properties by doping the ZnO with rare earth and/or high-valent elements; (5) to obtain the intrinsic relationships among the microstructure, conduction mechanism, and photoelectric properties; (6) to design new type dielectric/metal/dielectric multilayer structure to improve the optical performance and stability of the film; (7) to improve the flexing performance and th

英文关键词： ZnO；flexible transparent conductive film；transmittance；conductivity；adhesion