高品质金红石单晶体的生长及微观缺陷控制研究

项目名称： 高品质金红石单晶体的生长及微观缺陷控制研究

项目编号： No.51472047

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 一般工业技术

项目作者： 孙旭东

作者单位： 东北大学

项目金额： 83万元

中文摘要： 金红石单晶体在现代电子信息技术领域的应用越来越广泛，然而，高品质金红石晶体的生长技术仍然是国际上的难题, 相关基础研究理论匮乏, 特别是我国金红石晶体完全依靠进口。本项目基于常用的焰熔法，对金红石晶体生长动力学、缺陷（氧空位、位错、小角晶界、孪晶界、Magnél相、气孔夹杂等）的形成、演变及控制方法开展基础研究；建立缺陷的形成与固-液界面结构、迁移动力学机制、熔体内部结构特性及生长环境等的内在科学关系。同时，针对我国现有焰熔法生产设备存在的燃烧器和生长室结构的设计不合理的问题，基于流体力学、燃烧学、传热学和计算流体力学的理论分析，优化焰熔法燃烧器和生长室的结构，实现对氧分压、温度场、生长速度、生长界面与熔体状态等的全时监测和精确控制，达到精确调控晶体生长动力学的目的，有效解决晶体中缺陷密度高的难题。本项目可为高品质金红石单晶体的生长建立理论和技术基础，具有重要的理论和实际意义。

中文关键词： 金红石；单晶体；晶体生长；晶体缺陷；焰熔法

英文摘要： Rutile crystals have been used extensively in modern information technology. However, production of high quality rutile single crystals is still a difficult problem due to the lack of fundamental theoretical research. Especially in our country, the rutile crystals used rely completely on imports. Based on the commonly used Verneuil method, the present project will carry out fundamental research on the growth kinetics of crystals and mechanisms of formation and evolution of defects, including oxygen vacancy, dislocations, low angle grain boundaries, twin boundaries, Magnél phase, and porosities. The effect of solid-liquid interface structure, interface migration mechanism, internal structure of the molten phase, and the growth environment on defects formation will be studied. In order to solve the problem of unreasonable design of burner and growth chamber in the present Verneuil furnace in our country, the structure of burner and growth chamber will be optimized based on the theoretical analysis of fluid mechanics, combustion, heat transformation and computational fluid mechanics. It is expected that the oxygen partial pressure, temperature filed, growth rate, and the status of molten phase can be monitored and precisely controlled, realizing the purpose of the control of growth kinetics and reduction of crystal defects. The present project will establish the theoretical and technical basis for the growth of rutile single crystals, and has important theoretical and practical meanings.

英文关键词： Rutile;Single crystal;Crystal growth;Crystal defects;Verneuil method