冷凝吸附式声表面波气体传感器响应机理及应用研究

项目名称： 冷凝吸附式声表面波气体传感器响应机理及应用研究

项目编号： No.11304348

项目类型： 青年科学基金项目

立项/批准年度： 2014

项目学科： 数理科学和化学

项目作者： 刘久玲

作者单位： 中国科学院声学研究所

项目金额： 30万元

中文摘要： 基于冷凝吸附模式的声表面波气体传感器因具有检测范围宽、速度快、抗干扰能力强、灵敏度高、成本低等特点，使其在现场实时检测领域极具优势，在环境污染、公共安全等的质量监测方面显示出极大应用前景与重大学术价值，成为传感器技术当前研究的又一热点。但目前针对冷凝吸附式气体传感器的响应机理分析模型不够准确，而且对其中关键的冷凝吸附效率问题几乎没有相应的理论模型及研究。本项目拟通过对冷凝吸附式SAW传感器的基础理论模型的分析，冷凝吸附效率与检测下限关系的研究、物理结构的优化制备等，促进其真正走向实用化。主要研究内容为：（1）气体在ST-X石英基片表面及金属叉指电极上的吸附特性研究；（2）冷凝吸附式SAW传感器的响应机理及检测下限研究；（3）低损耗与单模式控制的SAW谐振器及以此为频控原件的振荡器的研制；（4）实验平台的搭建及实验验证。本项目的开展对冷凝吸附式声表面波气体传感器的真正实用化具有重要的意义。

中文关键词： 冷凝吸附；声表面波；响应机理；吸附效率；检测下限

英文摘要： The SAW gas sensors based on the condensate-adsorption effect with the characteristics of wide span, high speed, great ability of anti-disturbance， high sensitivity, low-cost, are more effective in real-time monitoring, and exhibit the high prospect and significant academic value in the environment pollution and public security, and the research on them has become another hot spot in sensor technology. However, current Response-Mechanism patterns of the SAW sensors based on the condensate-adsorption effect are not quite accurate. Furthermore, no theoretical pattern of and research on the key condensate-adsorption efficiency has been established and conducted. This research aims to work out the sensors based on the condensate-adsorption effect and promote their application by breaking through the key technologies-analyzing the basic theoretical pattern，researching on the relationship between the condensate-adsorption effect and threshold detection limit, and prioritizing the physical structure of the said sensors. The main contents of this proposal include: (1)the investigating of the absorption characteristics of the gas on the ST-X quartz chip and on the interdigital transducers (IDTs); (2) the analyses on the response mechanism and threshold detection limit of the sensors based on the condensate-adsorption eff

英文关键词： Condensate-adsorption Effect；Surface Acoustic Wave(SAW)；Response Mechanism；Adsorption Efficiency；Threshold Detection Limit