微纳尺度类金刚石碳膜动态力学性质及机理研究

项目名称： 微纳尺度类金刚石碳膜动态力学性质及机理研究

项目编号： No.11472080

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 数理科学和化学

项目作者： 陈坚

作者单位： 东南大学

项目金额： 86万元

中文摘要： 类金刚石碳膜（DLC）具有高硬度、高耐磨性和低摩擦系数，广泛应用于先进工业制造，并在微机械电子系统，航天航空等领域展示出重大应用前景。由于DLC在服役过程中常经受高速形变，甚至冲击载荷，准静态条件下（10-5~10-3s-1）力学性能难以准确评价其动态力学行为。本项目拟基于压入法，发展新型实用化薄膜动态力学实验检测技术与表征方法；系统研究DLC在不同应变速率（10-5~103s-1）和冲击能量（10-9~10-3J）下的形变与失效过程，细化实验动力学参数与薄膜成分与结构、厚度、内应力、界面和基体的交互作用，结合DLC热稳定性研究，明晰其的动力学响应及相关机理，对理解DLC和其他非晶材料在微纳尺度形变失效机理有着重要的科学意义。通过物理模型分析计算DLC动态力学性能（动态硬度，动态韧性，动态弹性应变极限和动态塑性抗力等），对于评价和预测其在实际工况条件下的可靠性和寿命具有重要工程价值。

中文关键词： 纳米压入；纳米冲击；类金刚石碳膜；动态载荷；力学性能

英文摘要： Due to their high hardness, high wear resistance and low coefficient of friction, diamond-like coatings (DLC) are widely used in advance machinery, and also showed great potential in micro electromechanical system and aerospace fields. During service the DLC often suffer high strain-rate deformation even impact, and their dynamic behaviour can not be well described by the quasi-static experimental data. In this project, a novel and practical dynamic mechanical testing for thin films will be developed based on an indentation method. The deformation and failure of the DLC will be systematically investigated at different strain rates (10-5~103/s) and impact energy (10-9~10-3J). The dynamic mechanisms during the deformation and fracture for the DLC will be researched intensively with consideration of the thermal stability and their bonding, chemical compositions, thickness, internal stress, the properties of the interface and the substrate,etc. These results can promote the scientific understanding in the deformation mechanisms of DLC and other amorphous materials in a nano/micro scales. Though building appropriate physical models, the corresponding dynamic mechanical properties (dynamic hardness, dynamic toughness, dynamic elastic strain limit and dynamic plastic resistance) for DLC can be determined. Such results can also benefit their engineering applications greatly by evaluating and predicting their reliability and life.

英文关键词： nanoindenation;nano-impact;diamond-like coating;dynamic load;mechanical property