透明氧化物半导体CuAlO2薄膜外延生长及其p型掺杂研究

项目名称： 透明氧化物半导体CuAlO2薄膜外延生长及其p型掺杂研究

项目编号： No.50802037

项目类型： 青年科学基金项目

立项/批准年度： 2009

项目学科： 金属学与金属工艺

项目作者： 兰伟

作者单位： 兰州大学

项目金额： 20万元

中文摘要： 性能优异的高质量p 型透明氧化物半导体（TOS）外延薄膜的制备是当前透明电子学发展中亟待解决的关键问题之一。CuAlO2 由于具有比较优异的光电综合性质而成为p 型TOS 的重要候选材料。本项目使用聚合物辅助沉积和磁控溅射技术分别在蓝宝石、单晶石英等单晶衬底上生长出高质量的CuAlO2 薄膜，通过对制备工艺的详细深入研究，元素比例的调控，获得了透明和导电性能较好的本征薄膜，并发现氧在CuAlO2薄膜结构和光电性能方面扮演着非常重要的角色。然后对本征薄膜样品进行了金属离子替位p 型掺杂，包括Mg替换Al位，Ni替换Cu位，比较得出Mg掺杂比Ni效果更好，使CuAlO2本征薄膜的电阻率下降了3个数量级，而Ni掺杂能明显改善薄膜的光敏特性。最后通过薄膜生长阶段和后期可控氮化处理，成功实现了CuAlO2薄膜的N 元素掺杂，薄膜电阻率进一步降低，获得具有良好透明和导电特性的高质量掺杂薄膜样品。围绕该项目研究内容，我们已发表SCI论文16 篇、申请国家专利3项、参加国际会议1次、培养2名博士、多名硕士和本科生。

中文关键词： 透明导电氧化物；CuAlO2 薄膜；p 型掺杂；光电特性

英文摘要： The epitaxial growth of p-type transparent oxide semiconductor (TOS) films with excellent properties is one of the key issues in the current development of transparent electronics. Because of its relatively good optical and electrical properties, CuAlO2 becomes an important candidate material of p-type TOS. In this project, high quality CuAlO2 films are grown on sapphire, single-crystal quartz (ST cut) substrates using polymer-assisted deposition and magnetron sputter technique. Some technologies, such as the optimization and improvement of the preparation process, the available control of element proportion, are utilized to obtain intrinsic films with good transparency and conductivity. Oxygen is found to be very important on structural, electrical and optical properties of CuAlO2 films. Then, p-type doped films are carried out through the displacement of metal ions (Mg doped in Al position, Ni doped in Cu position). It is found that Mg dopant is better than Ni on doping effect and the resistivity is decreased three orders of magnitude. An excellent photosensitivity is observed in Ni-doped CuAlO2 films. The resistivity is further reduced by N doping (growing films in N ambience and/or post-processing control) to obtain high quality doped films with transparent and conductive properties. We have published 16 SCI papers, applied 3 patents, attended 1 aboard conferences, and brought up 2 doctors, many masters and bachelors.

英文关键词： Transparent conductive oxide; CuAlO2 films; p-type doping; optical and electrical properties