纳米功能器件的聚焦离子束制造基础研究

项目名称： 纳米功能器件的聚焦离子束制造基础研究

项目编号： No.51275559

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 机械、仪表工业

项目作者： 徐宗伟

作者单位： 天津大学

项目金额： 80万元

中文摘要： 项目基于聚焦离子束(FIB)技术,针对纳米管(CNT)原子力显微镜探针的制备及其结构优化关键制造难题,系统展开了CNT探针制造装备的研制、CNT探针力学性能分析、关键参数优化和探针表征精度分析等研究,实现长度小于500nm、角度控制精度优于1°的CNT探针制备,项目进展顺利。发表1篇Book Chapter,7篇SCI论文,他引16次,授权专利4项,3次特邀报告。申请项目针对纳米功能器件FIB纳米制造中存在的纳米尺寸效应、材料加工工艺性等关键科学问题,提出镀膜辅助FIB制造、离子注入损伤修复等纳米制造新方法和新策略;阐明聚焦离子束的制造损伤及其修复方法等微观作用机理;开展FIB制造的典型纳米功能器件应用研究,建立FIB纳米制造的新工艺、新方法和微观机理的数据库和规范。本课题探索从制造方法、材料特性和微观机理等角度，展开FIB纳米制造基础研究，解决制约纳米功能器件应用的关键制造难题。

中文关键词： 聚焦离子束；纳米制造；纳米尺寸效应；分子动力学模拟；纳米光学器件

英文摘要： Based on the Focused Ion Beam (FIB) technology, our previous project aims to solve the key problems in the fabrication and optimizing of the Carbon Nanotube (CNT) probe for AFM. By implementing research systematically on the CNT probe’s fabrication platform developement,analysing mechanical property of CNT and optimizing key parameter as well as characterization its metrology precision, we realized the fabrication of CNT probe shorter than 500nm with precision of angle controlling higher than 1° and the project is progressing well. During this project, we have published one book chapter, seven SCI papers which have been cited by other researchers for 16 times till now, achieved four patents and gave 3 Invited presentations.The application project research aims at investigating the problems occur in the Focused Ion Beam fabrication of the nanoscale function devices, such as size effect in nanoscale and processing technic of special materials,proposing advanced new fabrication strategies such as coating associated FIB fabrication and ion implantation damage reparing. By combining the theory with experiment analysis we would clarify the microcosmic mechanism of the damage occurred during the FIB fabrication as well as the way to repair them and implemented the process of designing, fabricating and applying research

英文关键词： Focused ion beam；Nanomanufacturing；Nanoscale effect；Molecular dynamics simulation；Nano optical functional device