柔性氧化锌基透明导电薄膜的湿化学法制备与光电性能调控

项目名称： 柔性氧化锌基透明导电薄膜的湿化学法制备与光电性能调控

项目编号： No.51302218

项目类型： 青年科学基金项目

立项/批准年度： 2014

项目学科： 一般工业技术

项目作者： 段利兵

作者单位： 西北工业大学

项目金额： 25万元

中文摘要： 柔性透明导电氧化物(Transparent Conducting Oxides, TCO)薄膜相对于硬质薄膜具有可折叠、重量轻、不易破碎、易于大面积生产等优点，但如何在低于有机衬底耐热温度的处理温度下提高薄膜的成相质量、与衬底的粘附性和光电性能仍是柔性TCO薄膜应用和发展的一个十分关键的问题。本项目拟以调整燃烧合成前驱溶胶的溶剂、燃烧剂种类、G/N比等，以及调控纳米材料的形貌为切入点，运用溶胶－凝胶法旋涂或提拉工艺制膜，将燃烧合成与溶胶-凝胶两种方法有机结合起来，再配以紫外光照射和低温热处理（<150℃）等方式，设计出一套通用的柔性ZnO基TCO薄膜的湿化学制备工艺；研究薄膜的结构与光电性能关系，揭示内在的散射机理；并以此为理论依据，通过优化工艺细节、设计退火方式、调整能带结构等手段对柔性薄膜的光电性能进行调控，这对于基于ZnO基TCO薄膜电子器件的轻便化和商业化具有十分重要的意义。

中文关键词： 柔性衬底；ZnO；透明导电薄膜；湿化学法；光电性能

英文摘要： Flexible transparent couducting oxides (TCO) films own the advantages of flexible possibility, light, being not easy fragile, and could be achieved in large scale with respect to hard films. However, there is still a key problem that how to improve the crystallinity and adhersion between films and substrates and the optoelectrical properties under the melting points of the organic substrates. In this work,a versatile wet-chemical processing employed for preparing the flexible ZnO-based TCO films will be developed, starting from adjusting the types of solvent and fuel, G/N ratio, morphology and size of nano-materials in precursor sols,to combine both combustion method and sol-gel processes, along with the ultra-violet irradiation and low temperature annealing (<150 ℃). We will set up the relationship of structure and properties, reveal the intrinsic origin of scattering and then explore several effctive ways, including optimaion of preparation processing, designning of multiple annealing, and energy band modulation etc., to modify the optoelectronic properties of the flexible films, which is of important significance to the lighting and commercial application of ZnO-based films electronic devices.

英文关键词： flexible substrates；ZnO；transparent conducting films；wet chemical method；optoelectronic properties