分级多孔金属氧化物纳米纤维的制备及其气敏特性研究

项目名称： 分级多孔金属氧化物纳米纤维的制备及其气敏特性研究

项目编号： No.61271148

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 无线电电子学、电信技术

项目作者： 何秀丽

作者单位： 中国科学院电子学研究所

项目金额： 80万元

中文摘要： 分级多孔纳米纤维具有比表面积大、表面活性高、不易团聚等优点，在改善气体传感器性能方面具有很好的应用前景。本项目提出结合静电纺丝和等离子体刻蚀技术制备分级多孔金属氧化物纳米纤维的方法，采用静电纺丝方法制备纳米纤维，采用等离子体刻蚀方法进行纳米纤维的表面处理，探索等离子体刻蚀对纳米纤维的表面"雕镂"机理，制备出形貌可控的分级多孔金属氧化物纳米纤维；提出采用电场诱导的方法实现静电纺丝纳米纤维在MEMS微结构衬底上的可控沉积，利用MEMS衬底的快速温度调制特性研究分级多孔金属氧化物纳米纤维电荷输运机制及表面气体吸附/脱附行为，探索分级多孔金属氧化物纳米纤维的气体响应增敏机理，为高灵敏、高稳定、快速响应气体传感器的研制提供新方法及科学依据。

中文关键词： 金属氧化物；钠米纤维；气体传感器；等离子体刻蚀；多孔

英文摘要： The nanofibers with hierarchically porous structures show the potential application for the gas sensors with excellent sensing properties due to their large surface to volume ratio, high catalytic activity and less agglomeration. A novel method to fabricate the metal oxide nanofibers with hierarchically porous structures based on electrospinning and plasma etching has been proposed.The nanofibers willl be fabricated with electrospinning and the surface of the nanofibers will be treated with plasma subsequently. The mechanism of the plasma etching on the surface of the nanofibers will be explored and the nanofibers with controlled hierarchically porous structures will be prepared. The selective area deposition of the electrospun nanofibers on the MEMS substrate will be realizated by using the electric field induced collecting method and the mechanism of charge transport and gas adsorption-desorbtion on the surface of the hierarchically porous metal oxide nanofibers will be investigated under the rapid temperature modulation. The enhancement of the gas sensing properties of the hierarchically porous metal oxide nanofibers will be studied. The proposed novel method provides the scientific basis and a new way to develop the gas sensor with high sensitivity, rapid response/recovery and longterm stability.

英文关键词： metal oxide；nanofibers；gas sensor；plasma etching；porous