大视场复眼微光学元件的飞秒激光微加工方法研究

项目名称： 大视场复眼微光学元件的飞秒激光微加工方法研究

项目编号： No.61475124

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 无线电电子学、电信技术

项目作者： 杨青

作者单位： 西安交通大学

项目金额： 80万元

中文摘要： 人工复眼微光学元件具有体积小、重量轻、阵列化、视场大、灵敏度高等优点，在空间碎片探测、GPS姿态传感、导弹全方位制导、无人机及机器人视觉等方面均有十分重要的应用价值，而传统微加工工艺还难以制备这种大拱高复杂三维构型的高精密微光学元件。本项目提出一种大视场复眼微光学元件的飞秒激光湿法刻蚀新方法，拟深入研究飞秒激光与材料作用的瞬态机理、激光精细调控材料改性机制、改性区材料的化学刻蚀方法和人工复眼微光学元件微加工工艺，并在研究中逐步澄清激光加工中材料吸收光子能量对化学键的激活、改性机制，精确调控光与物质相互作用实现材料的目标靶向改性，获得激光逐点扫描控制光影响区材料能量沉积与化学湿法刻蚀与抛光的原理与方法，提高微光学元件的飞秒激光微加工效率、精度和质量，突破大拱高复杂三维构型微光学元件制造的技术瓶颈，探索和形成高性能人工复眼微光学器件的飞秒激光微加工新方法。

中文关键词： 飞秒激光；微加工；微光学元件；人工复眼；大视场

英文摘要： With small size, light weight , integrated, large field of view and high sensitivity，artificial compound eyes have important applications in the detection of space debris , a full range of missiles guiding, unmanned aerial vehicles and robot vision and so. Whereas, the traditional microfabrication processes are difficult to meet the needs of manufacturing of high precision micro-optical elements with such great arch of highly complex three-dimensional configurations. This project proposes a femtosecond laser wet etch new method for the wide-view micro-optic components manufacturing. It will carry out the studying in transient mechanism of interaction between femtosecond laser and materials, modification mechanism of laser fine-tuning materials, chemical wet etching of material modified zone, micromachining process of artificial compound eyes，and gradually clarify the mechanism of activated, modified chemical bond in material absorbing the photon energy, precisely regulate the interaction between laser and material to achieve targeted modification.The aim of this study is to obtain new principles and methods of energy deposition controls of light-affected zone material during the laser zone-by-point scanning, chemical wet etching and polishing, to improve the efficiency, accuracy and quality of micro-optical components,and getting a breakthrough in manufacturing the high-arch, complex three-dimensional configuration micro-optics, exploring a new method of femtoscond laser micormachining of the high-performance compound eye.

英文关键词： femtosecond;microfabriacation;micro-optical elements;compound eye;large field of view