飞秒激光湿法刻蚀微纳制造的基础研究

项目名称： 飞秒激光湿法刻蚀微纳制造的基础研究

项目编号： No.51335008

项目类型： 重点项目

立项/批准年度： 2014

项目学科： 机械、仪表工业

项目作者： 陈烽

作者单位： 西安交通大学

项目金额： 320万元

中文摘要： 飞秒激光微加工作为一种新型高能束微纳制造技术，在复杂三维构型制作方面具有其独特的优势，但激光加工效率的问题严重制约了飞秒激光微加工技术走向实际工程应用，已成为一个国际性难题。本项目在申请者良好的前期研究基础上，提出了一种飞秒激光湿法刻蚀微纳制造的新方法。以提高飞秒激光微加工的效率为突破口，通过调控激光与物质相互作用获得材料的目标靶向改性，进而结合化学刻蚀实现硬质材料的高速、高平滑加工；通过激光高速扫描加工中的动态色散补偿，提高飞秒激光的加工精度、质量和效率。并在研究中逐步澄清飞秒激光湿法刻蚀过程中激光对材料的化学键激活、改性机制，精确调控光与物质相互作用实现材料的靶向改性，获得激光逐点扫描材料化学能沉积的控制与材料表面化学刻蚀、抛光的原理与方法，开拓和形成高效高精度飞秒激光湿法刻蚀制造的新方法，解决激光直写加工效率低这一难题，推动我国高能束与特种能场制造技术进步。

中文关键词： 飞秒激光;微纳制造;湿法刻蚀;加工效率;表面质量

英文摘要： As a new high-energy beam machining technology，femtosecond laser microfabrication exhibits a unique advantage in fabricating complex three-dimensional micro-and nano-structures. But the efficiency of laser processing has severely restricted the technology development toward practical engineering applications, which has become an unsolved problem. Based on the basis of applicant’s preliminary studies, this project proposes a new method of femtosecond laser wet etch (FLWE) technology for micro-nano manufacturing in order to get a breakthrough against bottlenecks in promoting the efficiency of laser processing. Through manipulating laser-matter interaction and chemical etch processes to realize high speed, ultra smoothing manufacturing procedure for hard material. And in order to improve the machining process’s accuracy, quality and efficiency, the dynamic dispersion compensation should be employed during laser high-speed scanning. To obtain the new principle and method for realizing high efficient and high smooth etching and polishing of laser modified materials, this project will clarify the mechanisms of FLWE, such as chemical bond activation with laser irradiation, material modifications to achieve the accuracy controlling of chemical energy deposition during laser scanning process. And it will help to exploring a new FLWE method for fabrication of three-dimensional smooth surface with continuous controlled morphology and large arch height, and developing and achieving new FLWE method with high efficiency and precision, promoting the advance of manufacturing with Photons, Energetic Particles and Power Fields.

英文关键词： femtosecond laser;mciro-nano fabrication;wet etch ;fabrication efficiency;surface quality