多层复合微晶氧化镁薄膜电子发射机理及制备工艺研究

项目名称： 多层复合微晶氧化镁薄膜电子发射机理及制备工艺研究

项目编号： No.61461001

项目类型： 地区科学基金项目

立项/批准年度： 2015

项目学科： 无线电电子学、电信技术

项目作者： 韦海成

作者单位： 北方民族大学

项目金额： 47万元

中文摘要： MgO薄膜被广泛应用于真空电子器件、航空航天、材料形貌分析、平板显示、平面光源等领域，但较低的电子发射能力限制了其进一步应用。改善MgO电子发射特性是当前电子器件领域亟需解决的科学问题。本项目提出了一种多晶结构Ca-Mg-O和微晶结构Ba-Ca-Mg-O相结合的多层新型复合薄膜，通过在玻璃基板上制备多层复合MgO薄膜，研究：电子束蒸镀、磁控溅射工艺与薄膜微结构、电子发射特性的关系；高稳定性和高电子发射能力的复合薄膜关键工艺；BaO、CaO掺杂比与薄膜逸出功和微结构的关系；BaO掺杂形成热电子发射的工艺可调控性；复合薄膜的二次电子和热电子发射机理。项目的研究将获得CaO和BaO掺杂复合MgO薄膜电子发射机理，掌握新型MgO薄膜制备关键工艺。研究成果对复合MgO薄膜在提高电子发射能力方面的应用，改变宁夏地区Mg产业产量大、附加值低的现状，提供理论和实验基础，对地方经济和社会发展具有重要意义。

中文关键词： 真空电子学；真空器件；电子发射；微观机理；薄膜制备

英文摘要： The MgO film is widely used in vacuum electronic devices, aerospace, morphology analysis, flat display panel, new flat light source and other related fields，but its development is restricted by the lower electron emission capability. In order to improve electron emission efficiency of MgO film, a novel composite microcrystalline structure of microcrystalline Ba-Ca-Mg-O and polycrystalline Ca-Mg-O film is proposed. In the study, the relationship between electron emission mechanism of the CaO and BaO doping MgO film will be presented. The multilayer composite MgO films will be fabricated on the glass substrate. Besides, the relationship among the electron beam vapor deposition and the magnetron sputtering methods, the micro-structure of the composite film, and the electron emission efficiency of the film will be analyzed. Then, the key processes of the high stability and high electron emission capability composite films will be achieved. The relationship among CaO and BaO doping ratio, the work function and the Film micro- structures will be studied. The process of thermal electron emission of BaO doping in MgO film will be explored. Finally, the secondary electron emission and thermionic electron emission mechanism of the composite film will be analyzed. The result obtained in this subject are of great experimental significance and theoretical value in improving electron emission characteristic of the composite film. The subject will provide some ideas to promote the high value-added deep-processing technology of Mg industry in Ningxia. Meanwhile, it will play an important role in local economy and social development.

英文关键词： Vacuum Electronics;Vacuum Devices;Electron Emission;Microscopic Mechanism;Fabrication of the Film