半导体材料与器件的载流子输运参数成像

项目名称： 半导体材料与器件的载流子输运参数成像

项目编号： No.61574030

项目类型： 面上项目

立项/批准年度： 2016

项目学科： 无线电电子学、电信技术

项目作者： 王亚非

作者单位： 电子科技大学

项目金额： 16万元

中文摘要： 载流子输运参数（体复合寿命、表面复合速率、迁移率、扩散系数等）是表征半导体材料和器件性能的核心参数。从原材料制备到最终器件研制的每一道工序中，对材料内载流子输运参数的分布进行实时、精确、无损的空间表征，有助于分析掺杂浓度、杂质分布、界面状态、缺陷密度等关键因素，可实现对新结构、新工艺、器件效率的全面评估和优化，具有重要科学意义。锁相载流子辐射成像技术于2010年提出，是半导体检测领域的前沿热点技术，但由于近红外CCD的帧率和曝光时间的限制，无法实现高频成像，因而目前无法得到载流子输运参数分布的图像。本项目提出外差锁相成像原理，利用载流子辐射复合的非线性效应，实现非线性混频，构造出携带高频信息的拍频信号分量，可以突破技术瓶颈，使得动态成像频率不受限制，有望实现半导体材料和器件的载流子输运参数成像。本技术不仅能为微电子、光电子、传感器、光伏能源等领域的创新研究服务，而且具有广阔的工业应用前景。

中文关键词： 半导体材料与器件；载流子输运参数；光载流子辐射测量；锁相载流子成像；外差成像

英文摘要： As modern semiconductor materials science and technology is rapidly developing, suitable advanced characterization methods are in great demand. Thorough understanding of the relationship between structure, processing, physical properties, and how they are linked to device performance is the key to innovation in materials science and engineering. Since reliable and precise measurements are needed at all stages of R&D and production, it is crucial to develop real-time, detailed non-destructive and quantitative characterization methods for quality control and property evaluation through all phases of material processing, from raw wafer fabrication to final device integration. Carrier transport properties are among the most important parameters of semiconductor materials and devices. They determine the transport behavior of electrons in semiconductors across device structures, thus having direct impact on device performance. Although there are many techniques capable of determining carrier transport parameters, to-date none of them can simultaneously meet the following four requirements: 1) measurement precision and accuracy; 2) non-contact character; 3) lateral resolution (imaging); and 4) depth-selection or axial resolution (tomographic subsurface depth-profilometry). Based on the well-established principle of Pho

英文关键词： Semiconductor materials and devices；Carrier transport parameters；Photocarrier radiometry；Lock-in carrierography；Heterodyne imaging