飞秒激光高效高分辨多尺度全息动态加工方法研究

项目名称： 飞秒激光高效高分辨多尺度全息动态加工方法研究

项目编号： No.51275502

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 机械、仪表工业

项目作者： 李家文

作者单位： 中国科学技术大学

项目金额： 80万元

中文摘要： 飞秒激光双光子加工技术和计算全息技术是新发展起来的两种前沿技术。飞秒激光双光子加工具有真三维、高分辨、热影响小、加工材料广泛等优点；计算全息技术可以通过对光场的调制实现灵活可控的多焦点阵列。本申请将充分发挥两种技术的优势，针对目前飞秒激光全息加工中存在空间焦点一致性不易控制、分辨率不高、器件尺度小等缺点，发展一种高效、高分辨、多尺度飞秒激光三维全息加工新方法。项目主要研究内容有：建立从空间光调制器到目标光场的理论模型；根据目标光场振幅分布设计和优化三维全息算法并在空间光调制器上得以实现；进行几种典型材料的三维全息加工工艺研究，实现几种微纳米功能器件高效、高分辨、多尺度加工。本项目提出具有像差实时补偿的空间焦点一致性控制方法和利用动态焦点阵列生成基本单元进行加工具有新意。本研究将为发展高效高分辨多尺度飞秒激光加工方法奠定理论和技术基础，为我国飞秒激光微纳米加工技术的广泛应用和产业化做贡献。

中文关键词： 飞秒激光；空间光调制器；三维全息；并行加工；功能器件

英文摘要： Femtosecond laser two-photon processing and computer-generated hologram (CGH) are two newly developing frontier technologies. The former has many advantages such as real three dimensional fabrication ability, high resolution, tiny heat effect and wide processing materials.And the latter can realize flexible and controllable focus array by modulating the incident light field.There are some issues in current femtosecond laser holographic processing,such as controling the consistence of the space focuses, achieving high enough resolution and fabricating large scale devices.This program will take advantages of the two technologies and will be devoted to developing a new method for femtosecond laser dynamic holographic fabrication which has high efficiency, high resolution and multi-scale. The research contents include building a relationship model between CGH and target light field, design and optimization of three dimensional holographic algorithm according to the amplitude distribution in target light field, study on the processing technology of several typical materials and realization of some micro nano functional device manufacturing. The first innovation of this project is developing a control method to improve the space focus consistency with real-time aberration compensation. And the second is proposing a fa

英文关键词： femtosecond laser；spatial light modulator；three dimensional holography；parallel processing；functional device