基于三角柱-缝隙形电极结构的电共轭流体微动力源

项目名称： 基于三角柱-缝隙形电极结构的电共轭流体微动力源

项目编号： No.51205329

项目类型： 青年科学基金项目

立项/批准年度： 2013

项目学科： 机械工程学科

项目作者： 王海波

作者单位： 西南交通大学

项目金额： 25万元

中文摘要： 电共轭流体作为一类特殊的机能性绝缘流体具有良好的电流体动力学特性，当浸入其中的金属电极被施加数百伏特以上直流电压时，电极间流体将产生定向流动而形成射流，且强度伴随输入电压的提高而显著增强。通过上述过程，电能无需机械运动机构直接被转化为流体动能。本项目基于这种直接能量转换方式，对一种仅有数百微米特征尺寸，具有功率密度大，结构紧凑，体积小，无运行噪音等优点的电共轭流体微动力源开展研究工作，微动力源的电极采用三角柱-缝隙形电极结构。研究内容包括超厚、大纵横比三角柱-缝隙形微电极阵列的制造技术，数百微米特征尺寸的三角柱-缝隙形微电极阵列结构参数优化，微动力源流动可视化和具有旁路节流回路的微动力源微流道研究。本项目研究对象和研究成果将为微机械驱动器与执行器件的动力源提供了一种极富竞争力的解决方案。本项目以西南交通大学为依托，日本东京工业大学精密工学研究所横田真一教授，金俊完助教共同参与完成。

中文关键词： 电共轭流体；微型泵；MEMS；尺寸参数优化；旁路微流道

英文摘要： As a particular category of functional and dielectric fluid, electro-conjugate fluids (ECF) have excellent electrohydrodynamic features. When metallic electrodes inserted into ECF are subjected to DC voltage that is generally more than hundreds of volts, a powerful jet flow appears between the electrodes and the jet flow strength becomes stronger remarkably with the increase of input voltage. Obviously, electric energy is converted directly into kinetic energy of the fluid without moving mechanical parts by means of this process mentioned above. In this project, a micro hydraulic power source based on this direct energy conversion mode, which possesses several hundred microns feature size and has the merits of high power density, compact structure, small volume and noiseless operation, is aimed at and researched. One type of electrode structure named triangular-prism slit is selected as the electrode structure of the studied micro hydraulic power source. Research contents of this project mainly include fabrication technology of the micro triangular-prism slit electrode array with ultra thick height and high aspect-ratio, structure parameter optimization of micro triangular-prism slit electrode array with several hundred microns feature size, flow visualization of micro hydraulic power source and study on micro f

英文关键词： electro-conjugate fluid；micropump；MEMS；dimensional parameter optimization；bypass micro-channel