飞秒激光直写真三维自由基微电极的研究

项目名称： 飞秒激光直写真三维自由基微电极的研究

项目编号： No.61505208

项目类型： 青年科学基金项目

立项/批准年度： 2016

项目学科： 无线电电子学、电信技术

项目作者： 曹良成

作者单位： 中国科学院重庆绿色智能技术研究院

项目金额： 20万元

中文摘要： 电子元件体积的持续小型化和高度集成化对电池的体积和性能提出了较高的要求，材料及加工方法是制约电池体积微纳化和性能提高的瓶颈。多孔周期性三维电极结构，有利于缩短离子扩散路径，提高电极导电性和电极活性，实现电池功率密度和能量密度的同时提高。有机自由基电池是一类基于稳定自由基聚合物的氧化还原特性的新型可充电电池，具有高功率密度、快速充放电、循环稳定性好，安全环保、易加工、材料来源广等优势。本项目将结合自由基电池与飞秒脉冲激光多光子微纳加工技术高精度、良好的空间分辨率和真三维加工的优势，发展真三维结构微电池激光制造的新材料、新原理的和新方法。项目预期实现满足飞秒激光三维直写电极材料的组分设计，确立飞秒脉冲激光直写自由基真三维微电极的基本原理和方法。项目的研究结果可以为发展基于飞秒激光直写技术的真三维结构电池的制备提供理论基础和关键技术，对发展高性能电池具有重要意义。

中文关键词： 飞秒激光；激光直写；三维微电极；有机自由基聚合物；光刻胶

英文摘要： Microelectronics have benefitted from continuous miniaturization and integration, whereas there has been much less progress in miniaturization and performance of power sources. A battery architecture based on 3D integrated porous microelectrodes could achieve high-power density without sacrificing energy density by combining small ion diffusion distances, large percentage of active material and highly conductive electrodes. Such a microarchitecture could also enable miniature batteries suitable for microelectronics integration. Organic radical battery (ORB) is a redox but stable free radical polymer-based rechargeable battery of high power density, rapid charging /discharging speed, good stability, environmental friendly, easy processing and wide raw material sources. 3D structured ORB micro-batteries are proposed in this project by femtosecond laser direct writing (FsLDW) method because of its unique 3D processing capability, arbitrary-shape designability, and high fabricating accuracy. The project is expected to develop electrode materials for FsLDW, as well as establish the principle and method for FsLDW 3D micro-electrode. The results would provide scientific basis and key technologies for further 3D micro-battery fabricated by FsLDW, and give great significance for high-performance batteries.

英文关键词： femtosecond laser;laser direct writing;3D micro-electrode;organic radical polymer;photoresist