基于MEMS技术的THz焦平面阵列及其宽带成像的理论和方法研究

项目名称： 基于MEMS技术的THz焦平面阵列及其宽带成像的理论和方法研究

项目编号： No.61275104

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 无线电电子学、电信技术

项目作者： 于晓梅

作者单位： 北京大学

项目金额： 90万元

中文摘要： 项目针对目前太赫兹探测成像技术面临的分辨率低、成像速度慢、动态范围小、探测系统庞大等问题，研究一种基于MEMS焦平面阵列（FPA）技术的THz宽带成像的理论和方法。通过研究THz波的局域理论及其宽带增强吸收结构的设计方法；研究低噪声、高分辨率FPA的设计方法和关键制备工艺；研究FPA的真空封装技术及其封装工艺的兼容性；研究 FPA的非均匀校正与补偿技术；研究FPA的高灵敏度信号读出及其图像处理技术，解决THz辐射的能量转换效率、超材料的宽带电磁响应、框架式FPA的热力学设计、谱平面能量离散分布等科学问题，突破高分辨率FPA的关键制造瓶颈工艺问题，开发出一种独具特色的THz探测成像方法。该研究将突破现有电子学和光子学THz探测技术的局限性，将为高性能THz成像技术的发展探索一条可行之路。

中文关键词： 太赫兹；焦平面阵列；双材料微悬臂梁；超材料；牺牲层工艺

英文摘要： Aiming at the present problems of terahertz (THz) imaging technology, such as low resolution, low frame rate, small dynamic range and complex detection system, this proposal focuses on the studies of theoris and methodologies of a novel THz focal plane array (FPA) and its broadband imaging based on micro-electro-mechanical system (MEMS) technology. We will study the localization theory of THz radiation, the method of broadband enhanced absorption of THz radiation, the optimized design of low-noise micro-cantilever FPA, the key fabrication processes of high resolution FPA, the method of vacuum packaging and the process compatibility of FPA, the inhomogeneous correction and compensation of FPA, the optical readout with high sensitivity and the image data processing. By solving a series of scientific and technical problems, such as the energy transforming efficiency of THz radiation, the broadband response of metamaterial, the energetic design of framed FPA, and the readout light scattering on spectra plane, therefore develop a novel THz imaging technology. This study will break through the limitations of present THz detection technologies based on electronics and photonics and explore a feasible road for high performance THz imaging technology.

英文关键词： terahertz；focal plane array；bi-materials microcantilever；metamaterial；Sacrificial layer process