基于飞秒激光诱导的深亚波长表面结构衬底的纳米线阵列制备和性能研究

项目名称： 基于飞秒激光诱导的深亚波长表面结构衬底的纳米线阵列制备和性能研究

项目编号： No.61205209

项目类型： 青年科学基金项目

立项/批准年度： 2013

项目学科： 信息四处

项目作者： 王能文

作者单位： 中国科学院上海光学精密机械研究所

项目金额： 28万元

中文摘要： 结合化学气相沉积法、飞秒激光技术、化学腐蚀法，采用飞秒激光技术制备衬底（Si, GaAs, Al2O3, GaN等）表面上的深亚波长结构，并以这种图案结构作为衬底，在化学气相沉积法中通过调整工艺参数和选择合适的衬底材料，制备具有深亚波长结构表面衬底上的纳米线阵列,如ZnO纳米线阵列，分析研究产物的结构、光学、光电等性能，以及衬底表面的深亚波长结构与ZnO纳米线阵列在生长、性能方面的相互调制作用，提出合理的物理机制，建立物理模型，采用时域有限差分法(FDTD)数值计算和模拟方法进行验证，优化实验方案，以期制备高质量、性能优越的ZnO纳米线阵列。这种超快激光诱导的亚波长结构表面与一维纳米材料相结合，更将产生许多新奇的实验现象和新性能，有望在光电子器件、激光器、生物、传感、存储等领域具有重要的应用价值和学术意义。

中文关键词： 氧化锌纳米结构；飞秒激光；深亚波长结构；光学性能；

英文摘要： Combined chemical vapor deposition (CVD) method, femtosecond laser technique and chemical etching technique, we attempt to pattern substrates , for example, Si wafer, GaAs, Al2O3, GaN, with deep subwavelength structure surfaces induced by femtosecond laser, then synthesis nanowire arrays on the patterned substrates by CVD method,such as ZnO nanowire arrays,via adjusting the technological parameters and adopting suitable pre-treated substrates. Further, we intend to research the structures, optical and photoelectric properties of the products, as well as the intermodulation relationship between the deep subwavelength structure surfaces and ZnO nanowire arrays on the functions and growth mechanisms of ZnO nanowire arrays. According to experimental data, we could propose reasonable physical mechanisms, establish relevant physical models and employ finite difference-time domain analysis (FDTD) to validate them. Finally, we could be able to fabricate ZnO nanowire arrays with higher quality and more excellent propertie by optimizing the experimental programs. This intergration of nanostructures and deep subwavelength structure surfaces induced by femtosecond laser may bring numerous unique experimental phenomena and fantastic performance, in addition, have great potential applications and important significance on pho

英文关键词： ZnO nanostuctures；femtosecond laser；deep subwavelength structure；optical properties；