项目名称: 基于晶体力-频传感特性的高性能温度补偿泛音晶体振荡器的基础研究
项目编号: No.11503019
项目类型: 青年科学基金项目
立项/批准年度: 2016
项目学科: 天文学、地球科学
项目作者: 苗苗
作者单位: 西安电子科技大学
项目金额: 25万元
中文摘要: 本项目针对传统的线路补偿类型的温度补偿晶体振荡器指标受限的问题,研究晶体的应力-频率特性和温度-频率特性之间的关系,结合泛音晶体切角、厚度、加力方向等对力频特性的影响,优化泛音晶体的力学模型和力频特性模型,开发基于应力稳频的温度补偿泛音晶体振荡器。然后研究晶片的薄膜应力和双层薄膜应力特性,采用动态镀膜技术解决动态应力和静态应力的残留与释放效应,提高新型晶体振荡器的稳定性。本项目技术成果将实现基于泛音晶体的TCXO,其频率温度稳定度在-50℃至+85℃宽温度范围内达到10^(-7)量级,日老化率达到1*10^(-9)/日,相位噪声低于-145dBc/1kHz。
中文关键词: 泛音晶体;薄膜;应力;温度补偿晶体振荡器;加工工艺
英文摘要: According to the limit of traditional TCXOs compensated by circuit, through the research on the stress-frequency characteristic, the temperature-frequency characteristic and their relationship, the project proposes the TCXO based on force-frequency characteristic, combining the influence on the stress-frequency of the cut angle, the thickness and the stress direction and optimizing the dynamics model and the stress-frequency model. The research on the film’s stress and the double-films’ features will contribute to the stability of the new type oscillators, adopting the dynamical film technology to solve the remains and release of the dynamic stress and the static stress. The achievement of the project will be the TCXOs with overtone crystals. Its stability can reach the order of 10^(-7) in a wide temperature range from -50℃ to +85℃. Tts aging rate can be reduced to1*10^(-9)/day and the phase noise will be below -145dBc at 1kHz.
英文关键词: overtone cystal;film;stress;TCXO;manufacturing processes