新型多元掺杂碳基薄膜的结构设计及多环境摩擦适应性研究

项目名称： 新型多元掺杂碳基薄膜的结构设计及多环境摩擦适应性研究

项目编号： No.51505318

项目类型： 青年科学基金项目

立项/批准年度： 2016

项目学科： 机械、仪表工业

项目作者： 吴艳霞

作者单位： 太原理工大学

项目金额： 22万元

中文摘要： 非晶碳氢（a-C:H）薄膜以其高硬度、稳定的化学性质、超低的摩擦系数和磨损率等优点，在高新技术领域显示了重要的应用前景，但薄膜摩擦学行为的环境敏感性，制约了它的实际应用。本项目拟采用磁控溅射结合射频等离子增强化学气相沉积技术，制备弱碳金属Ag、非金属Si共掺a-C:H薄膜，利用Ag的自润滑性能以及Si的化学活性，改善薄膜在不同环境中的摩擦学性能，提高其多环境摩擦适应性。研究Ag、Si在薄膜中的存在形式及其对薄膜微观结构、力学性能的影响；考察掺杂薄膜在不同测试环境中的摩擦学行为，探讨摩擦过程中薄膜的内部结构转变和外部因素（如环境参量、摩擦条件、接触对偶等）的耦合作用；阐明薄膜在不同测试环境中的摩擦作用机理，提出影响薄膜多环境摩擦适应性的关键因素，揭示薄膜的微结构—力学性能—多环境摩擦学性能之间的作用关系。本项目的研究结果将为开发多环境摩擦自适应的a-C:H薄膜提供一定的理论参考和研究思路。

中文关键词： 弱碳金属；非金属；非晶碳氢薄膜；微结构；摩擦

英文摘要： The amorphous hydrogenated carbon (a-C:H) film shows important application prospect in the field of advanced technology because of its high hardness, stable chemical properties, ultra low friction coefficient as well as the wear rate, and etc. However, the tribological properties of the film are environmental sensitivity, which restrict its practical use. The a-C:H film doped with weak carbon-bonded metal Ag and non-metallic element Si will be prepared by magnetron sputtering accompanied with radio frequency plasma enhanced chemical vapor deposition in this project. Combined with self-lubrication property of Ag and chemical activity of Si, the project is aimed at improving the tribological properties and frictional adaptability of the film in multi-environments. Firstly, the existing format and influence of the two doped elements on the microstructure and mechanical properties of the film will be analyzed. Secondly, the tribological properties of the doped film in various environments will be investigated, the coupling effects combined with the inner structural transformation of the film and the outer factors (such as environmental parameters, frictional condition, counterparts and so on) will be discussed as well. Thirdly, the wear mechanisms related with them will be explained, and the key factors affect the tribological properties of the film in multi-environments will be proposed. Additionally, the relationship among the microstructure, mechanical properties and tribological properties of the film in multi-environments will be revealed. The result of this project will provide theoretical reference and research idea for the development of a-C:H film with self-lubrication in multi-environments.

英文关键词： weak carbon-bonded metal;non-metallic element;amorphous hydrogenated carbon film;microstructure;friction