应用于物联网微电子器件的MEMS基压电微型能量采集技术研究

项目名称： 应用于物联网微电子器件的MEMS基压电微型能量采集技术研究

项目编号： No.61204119

项目类型： 青年科学基金项目

立项/批准年度： 2013

项目学科： 信息四处

项目作者： 杨斌

作者单位： 上海交通大学

项目金额： 26万元

中文摘要： 基于MEMS技术的微型能量采集器具有结构简单、易集成、寿命长、微型化等优点，在当今日益发展顺速的物联网、可植入人体器件中有着潜在的应用前景，是当前开发新型清洁能源的重要途径之一。到目前为止，由于MEMS技术的能量采集器输出功率较低难以应用到微电子器件中，因此还处于研发阶段。本项目以研究高转换效率和高输出功率的能量采集器为研究对象，利用新颖的工作机制即频率转换和多频结合的方式提高和改善输出性能；研究空气阻尼对输出性能的影响，采用低成本的真空封装研究其性能；并采用优化设计的电路和测试平台对研发的样机进行性能评估和分析，探索其在物联网中微电子器件应用的可行性，为开发新型清洁能源奠定技术和应用基础。

中文关键词： 压电能量采集器；键合；减薄；；

英文摘要： MEMS-based micro energy harvesters have some advantages, such as simple structure, easy integration, long life and microminiaturization. With the rapid development of internet of things and implantable devices, micro energy harvester will be one of some important methods of developing novel clean power sources. Up to now, because the output power of MEMS-based energy harvester is very low, it is difficult to provide enough power for micro electronic devices. Currently MEMS-based energy harvesters are in the phase of developing and research. This pupose of this project is to improve the conversion coefficient and output power through the hybrid mechanisms of frequency-up and multi-frequency. The effect of air damping on the output voltage will be studied by the low cost packaging of the fabricated device. Based on the optimized circuit and set-up plat form, the output performance of the harvester is evaluated and analyzed. Then the feasibility of the harvesters in the application of internet of things will be explored, which will build up a good technical and application basis for the development of novel clean power sources in future.

英文关键词： piezoelectric energy harvester；bonding；thinning；；