基于波导型光电探测器的阵列太赫兹源基础研究

项目名称： 基于波导型光电探测器的阵列太赫兹源基础研究

项目编号： No.61474112

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 无线电电子学、电信技术

项目作者： 梁松

作者单位： 中国科学院半导体研究所

项目金额： 89万元

中文摘要： THz技术在科学研究领域和日常生活领域都具有广泛的应用前景，然而，高性能THz源的缺乏严重的限制了THz技术的实际应用。有鉴于此，本课题研究一种基于InP基波导型单行载流子探测器（UTC-PD）的连续波THz天线阵列。UTC-PD是一种高效率的THz混频器件，阵列单元辐射的相干叠加又可以进一步显著增强THz辐射功率。 基于课题申请人的一项发明，本课题采用波导型UTC-PD结合多模干涉耦合器（MMI）的阵列天线制作方案，克服了阵列单元受光不均匀的缺点，从而可以明显提高THz天线阵列的性能。课题的主要研究内容包括：高速、高饱和电流UTC-PD的研制；低损耗、功率分配均匀MMI的研制；MMI与UTC-PD阵列的单片集成技术研究；高性能THz天线及其阵列的研制。UTC-PD混频器件本身的特点结合单片集成的制作技术使所研制的天线阵列成为一种同时具有低成本、高效率、结构紧凑、室温工作等优点的连续波THz源。

中文关键词： 光子集成；波导型光电探测器；太赫兹源

英文摘要： THz technique has many potential applications in both scientific research fields and daily lives. However, the lack of high performance THz source hinders the wide spread of the practical use of the technique. To alleviate the situation, a kind of continuous wave(CW) THz antenna array based on uni-traveling carrier photodetectors(UTC-PD) will be studied. UTC-PD is a photomixer with high efficiency. Coherent combination of THz radiation from different elements of the array will further increase the output power greatly. To fabricate the antenna array, a scheme that combines a multi-mode inference (MMI) coupler and edge coupled waveguide UTC-PDs is proposed. This avoids the unequal feeds of pump light among different array elements, which deteriorates the performance of an antenna array greatly. The following aspects will be focused in the study: The fabrication of UTC-PD with high speed and high saturation current; The fabrication of MMI coupler with low transmission loss and equal power at each output waveguide; The monolithic integration of UTC-PDs with MMI; The design and fabrication of high performance THz antenna and antenna array. The use of UTC-PD as element photomixer and the monolithic fabrication technique make the antenna array fabricated in this project a low cost, highly efficient, extremely compact, room temperature working high power CW THz source.

英文关键词： photonic integration;waveguide photodetector;THz source