Transmission electron microscopy (TEM) is one of the primary tools to show microstructural characterization of materials as well as film thickness. However, manual determination of film thickness from TEM images is time-consuming as well as subjective, especially when the films in question are very thin and the need for measurement precision is very high. Such is the case for head overcoat (HOC) thickness measurements in the magnetic hard disk drive industry. It is therefore necessary to develop software to automatically measure HOC thickness. In this paper, for the first time, we propose a HOC layer segmentation method using NASNet-Large as an encoder and then followed by a decoder architecture, which is one of the most commonly used architectures in deep learning for image segmentation. To further improve segmentation results, we are the first to propose a post-processing layer to remove irrelevant portions in the segmentation result. To measure the thickness of the segmented HOC layer, we propose a regressive convolutional neural network (RCNN) model as well as orthogonal thickness calculation methods. Experimental results demonstrate a higher dice score for our model which has lower mean squared error and outperforms current state-of-the-art manual measurement.


翻译:电子传输显微镜(TEM)是显示材料和胶片厚度的微结构特征的主要工具之一。然而,从TEM图像中人工确定胶片厚度既费时又主观,特别是当有关胶片非常薄,而且测量精度需要非常高时尤其如此。在磁硬盘驱动器工业中,头部上衣(HOC)厚度测量就是这种情况。因此,有必要开发自动测量 HOC 厚度的软件。在本文件中,我们首次提议采用以NASNet-Large为编码器的 HOC 层分层法,然后采用解码器结构,这是为图像分层进行深层学习时最常用的结构之一。为了进一步改进分解结果,我们首先提议一个后处理层层以去除分解结果中的不相关部分。为了测量分层HOC层的厚度,我们提议采用一个递减性神经神经网络模型(RCNNN)模型,以及或多层厚度计算方法。实验结果显示我们模型的当前手动模型的比值比值更高。

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