白光同步相移显微干涉动态表面形貌精密测量技术与系统研究

项目名称： 白光同步相移显微干涉动态表面形貌精密测量技术与系统研究

项目编号： No.51475192

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 机械、仪表工业

项目作者： 刘晓军

作者单位： 华中科技大学

项目金额： 85万元

中文摘要： 产品表面形貌在位工况环境下动态精密测量，是表面质量监测、工艺评价和误差有效补偿的基础；诸如MEMS、IC、薄膜、微器件等产品和科学样件表面形貌在面和离面动态精密测量是其动态特性、可靠性、制造工艺分析及有效应用的前提。因此，动态表面形貌和结构精密测量面临广泛需要。本项目利用光学干涉测量技术非接触、全场、高精度特点，研究动态表面形貌和结构精密测量的理论和技术。主要研究白光同步相移显微干涉技术，建立白光同步相移干涉显微镜；研究等效波长干涉解包裹技术和双等效波长干涉等级搜索匹配求解技术,实现白光同步相移显微干涉的相位解析及被测表面重建；研究基于并行计算架构的干涉相位恢复和表面重建算法的快速实现。在此基础上，建构白光同步相移显微干涉动态表面形貌与结构精密测量系统。项目研究对于精密加工表面形貌与结构质量保证,MEMS、IC、薄膜、微器件动态特性、可靠性与制造工艺分析及生物科学研究等都具有重要意义。

中文关键词： 表面形貌；动态测量；精密测量；白光干涉；同步相移

英文摘要： Precision measurement of dynamic surface topography under the conditions of product environments, is an important foundation for surface quality monitoring, process evaluation and effective compensation of errors. Dynamic precision measurements for in plane and out of plane movement of MEMS, IC,thin film and other products and scientific samples is the premise of its dynamic characteristic and reliability characterization and their manufacturing process analysis and effective applications. Therefore, dynamical surface topography and structure precision measurement is of great significance. Making use of optical interferometry technique, which has the features of non-contact, full field, and high-precision, the project will investigate high-precision measurement theory and technology for dynamic surface topography and structure. Main researches are focused on the white light interference microscopy synchronous phase shifting technology, which helps continuous dynamic precision surface topography measurement; Based on white light synchronous phase shifting interference and color CCD image acquisition, the white light interference and multi-wavelength interferometric phase analysis technology are investigated to realize precision measurement of dynamic surface structure with large range; Quick reconstruction algorithm for dynamic interference phase is also investigated based on CUDA. Finally，based on the research above, a precision measurement system for dynamic surface topography and structure is constructed based on white light synchronous phase shifting interferometry. The research by the project will be significant for quality guarantee of precision machining surface topography and structure, and also for analysis of dynamic characteristics, reliability and manufacturing process and research on biological science.

英文关键词： surface topography;dynamic measurement;precision measurement;white light interference;synchronism phase shifting