基于超长ZnO纳米线阵列的压电型次声传感器研究

项目名称： 基于超长ZnO纳米线阵列的压电型次声传感器研究

项目编号： No.51302316

项目类型： 青年科学基金项目

立项/批准年度： 2014

项目学科： 一般工业技术

项目作者： 邵铮铮

作者单位： 中国人民解放军国防科学技术大学

项目金额： 25万元

中文摘要： 目前次声传感器已广泛应用在地震、海啸次声波检测，核爆炸次声波检测，环境次声污染监控等领域，而现有技术中的传感器大部分存在灵敏度低、温度漂移大、一致性差、体积较大等缺陷。本项目以微型化、灵敏度高、频率响应宽、工作稳定性好的次声传感器为研究目标，提出基于超长ZnO纳米线阵列的压电型次声传感器研究。利用ZnO纳米线高长径比、单晶结构、压电性能高、柔韧性好、可实现可控生长等优点，以纳米线响应振动时的径向压电输出作为响应信号，研制高灵敏的微型化次声传感器，并通过大量纳米线的并联提高压电信号的输出。重点解决超长ZnO纳米线阵列的可控生长技术，ZnO纳米线阵列的接触印刷转移技术，抑制纳米线表面氧空位的氧离子表面处理技术，以及器件的制作和测试等关键科学问题。通过本项目的研究，为实现微型化、高灵敏度的压电型次声传感器奠定基础，并为其在地球物理、环境监测和军事领域开辟广阔的应用前景。

中文关键词： 压电；氧化锌纳米线；次声传感器；印刷转移；

英文摘要： Infrasonic transducers are widely utilized for monitoring earthquake, tsunami, nuclear explosion, environment noise, and so on. But most of the infrasonic transducers have a few disadvantages, such as low sensitivity, temperature drift instability, low compatibility and large volume. Considering the problems with the infrasonic transducer, we present here a novel piezoelectric infrasonic transducer based on ultra-long ZnO nanowire arrays, aiming for micromation, high sensitivity, wide response frequency and high stability. The outstanding performance of ZnO nanowire, such as large slenderness ratio, single crystal, high piezoelectricity, good flexibility and controllable synthesis, is applied to fabricating piezoelectric transducer. The piezoelectric potential created between two ends of ZnO nanowire when tensile strain is used as response signal, and the signal is enhanced by integrating huge nanowires. In our advanced project, we pay attention to some key technical matters, controllable synthesis of ultra-long ZnO nanowire arrays, transferring ZnO nanowire arrays dry contact printing method, neutralization oxygen vacancies of nanowires by oxygen plasma treatment, fabricating and testing the infrasonic transducer. In brief, we present a technical plan to achieve a high performance piezoelectric infrasonic tran

英文关键词： Piezoelectronic；zinc oxide nanowire；infrasonic transducer；printing transfer；