硅基集成化可重构光学导向逻辑器件的研究

项目名称： 硅基集成化可重构光学导向逻辑器件的研究

项目编号： No.61204061

项目类型： 青年科学基金项目

立项/批准年度： 2013

项目学科： 信息四处

项目作者： 张磊

作者单位： 中国科学院半导体研究所

项目金额： 30万元

中文摘要： 本申请拟采用一种集成光学元件- - 微环谐振器，来实现可完成"异或/同或"及"与/与非"逻辑运算的可重构光学导向逻辑器件。硅基微纳波导将被用来制作微环谐振器。波导交叉节点将采用缓变结构来减小由于模场不匹配引起的损耗和串扰。波导输入/输出端将采用倒锥型结构来减小波导与光纤的模场失配，从而提高耦合效率。硅的等离子色散效应将被用于微环谐振器的高速调制。将建立掺杂调制区物理模型，提取出器件电学参数。结合电磁场仿真软件来优化掺杂浓度和电极结构，提高器件带宽，实现阻抗匹配及掺杂区与光场分布区域的匹配，从而提高器件的调制效率与工作速度，使其具有低工作电压与功耗。本申请将最终利用CMOS兼容工艺制作出可重构光学导向逻辑器件。与传统光逻辑器件相比，本申请拟研究的基于硅基微环谐振器的光学逻辑器件制造工艺与现有微电子工艺兼容，器件体积小、功耗低、易扩展，便于和电学元件集成，有望实现硅基单片集成的多功能信息处理系统。

中文关键词： 硅基微纳波导；微环谐振器；可重构光学导向逻辑器件；；

英文摘要： The aim of this application is to develop a reconfigurable directed logic device based on integrated micro-ring resonators (MRRs), which can be reconfigured to carry out the logic operations of XOR/XNOR and AND/NAND. Silicon submicron waveguides will be employed to compose the MRRs. Slowly varying structures will be adopted to reduce the loss and cross-talk caused by mode-mismatching at the crossing of the waveguides. Inversed tapers are integrated on the input and output terminals of the waveguides to reduce the mode-mismating between the waveguides and the fibers to enhance the coupling efficiency. The plasma dispersion effect in silicon will be employed to modulate the MRR at a high speed. The physical model of the doping and modulating area will be established, through which the electrical parameters of the device will be extracted. The doping concentration and the dimensions of the electrodes will be optimized using the electromagnetic simulation software, which will result in the characteristics of higher bandwidth, impedance matching and the matching of the doping area and the optical field distribution. The performance of the device will be improved in terms of the mulation efficiency and the working speed, resulting in lower operating voltage and power dissipation. Reconfigurable directed logic devices

英文关键词： silicon submicron waveguide；micro-ring resonator；reconfigurable optical directed logic device；；