基于透明薄膜晶体管应用的SrTiO3透明半导体薄膜制备及其光电性能研究

项目名称： 基于透明薄膜晶体管应用的SrTiO3透明半导体薄膜制备及其光电性能研究

项目编号： No.61306009

项目类型： 青年科学基金项目

立项/批准年度： 2014

项目学科： 无线电电子学、电信技术

项目作者： 贠江妮

作者单位： 西北大学

项目金额： 25万元

中文摘要： 目前各研究小组所制备的SrTiO3 透明半导体薄膜，其电学性能和稳定性仍不理想，不能满足高性能全透明SrTiO3-TFT器件的要求。本项目采用基于密度泛函理论的第一性原理计算方法，建立反映薄膜的组分、微结构、价态以及不同的掺杂元素、掺杂浓度等 因素与薄膜电导率及光学性质关系的理论模型，计算半导化掺杂SrTiO3 透明半导体薄膜的电子结构及光电性质，揭示薄膜的微观结构对薄膜光、电性能调制的微观机理；采用溶胶凝胶法制备高质量SrTiO3 透明半导体薄膜，通过引入表面活性剂和矿化剂，同时匹配调节体系PH 值，并结合对薄膜材料微观结构的实验测试分析，实现SrTiO3 透明半导体薄膜电导率的可控调制，获得制备高质量SrTiO3 透明半导体薄膜的优化工艺，为设计和开发高性能全透明SrTiO3-TFT器件提供实验和理论指导。

中文关键词： SrTiO3透明半导体薄膜；光电特性；溶胶凝胶法；磁控溅射法；第一性原理计算

英文摘要： Up to now,the electrical properties and stability of SrTiO3 transparent semiconductor thin films prepared by many research teams are not ideal,and its performance can not meet the requirment of the transparent SrTiO3-TFT devices. In this project, the theoretical model of semiconductor doped SrTiO3 transparent semiconductor thin films is bulit by the first-principles calculations based on the density functional theory.This theoretical model can reflect the relationship between the process parameters such as components,microstrucure,doping element,doping concentration of the thin film and so on, and the electrical conductivity and optical performance of the semiconductor doped SrTiO3 thin films.The electronic structure and the photoelectric properties of the SrTiO3 transparent semiconductor thin films are also calculated to reveal the effect of the microstructure of the thin films on the photoelectric performance.Meanwhile, the SrTiO3 transparent semiconductor thin films are prepared by the sol-gel method.By introducing the surfactant and the mineralizer,together with adjusting the PH value of the as-prepared sol systems, analysising of obtained experimental test results of the microstructure of the SrTiO3 transparent semiconductor thin films, the electrical conductivity of the as-prepared SrTiO3 transparent se

英文关键词： SrTiO3 transparent semiconductor thin films；optical and electrical properties；sol-gel method；magnetron sputtering；the first-principles calculations