纳米Ag膜生长和退化机理及其化学稳定性研究

项目名称： 纳米Ag膜生长和退化机理及其化学稳定性研究

项目编号： No.61308070

项目类型： 青年科学基金项目

立项/批准年度： 2014

项目学科： 无线电电子学、电信技术

项目作者： 周明

作者单位： 中国科学院上海技术物理研究所

项目金额： 19万元

中文摘要： 纳米银膜作为一种航天遥感、偏振器件、节能玻璃中广泛应用的金属材料，在可见-近红外光谱区域有良好的光学特性，但其光学常数难以准确获得和环境稳定较差两方面因素限制其使用。本项目拟对单个纳米连续厚度银膜开展研究，获得连续厚度银膜的小岛面分布均匀性及其尺寸分布。采用蒙特卡罗方法模拟其生长过程，椭偏光度法分析其光学常数。自然放置和快速退火相结合方法分析其表面结构退化过程，分析其光学性能退化机理。采用共溅方式获得不同组分Cu掺杂银膜，采取EMA混合模型分析其光学常数，利用能谱仪分析其元素含量，以求获得长寿命使用的高光学性能纳米银膜。该项目对于保证溅射方法沉积纳米Ag薄膜的稳定性，理清纳米银膜成膜和退化机理有很重要的科学研究价值，能提高所研制的含有纳米层银膜薄膜器件的光谱调控能力和使用寿命。

中文关键词： 银薄膜；光学常数；合金膜；稳定性；

英文摘要： Nano silver film, as a kind of metal material, is widely used in space remote sensing, polarization devices, Low-E glass, and has good optical properties in the visible-near-infrared spectral region. The application of nano silver film is restricted for difficult to accurately obtain the optical constants and poor environment stable. This project is intends to carry out the research about single nanometer continuous thickness silver film, obtain the surface distribution uniformity island and size distribution for continuous thickness film. Monte Carlo method is used to simulate the growth process, optical constants data is obtained by Spectroscopic Ellipsometry. Natural environment place and rapid thermal annealing combined analysis is used to obtain the degradation process of the surface structure, and its optical performance degradation mechanism is analyzed. The different components of Cu-doped silver film are obtained by Co-sputtering method, EMA mixed model is used to analysis the optical constants, and the element of content is obtained by EDS. This project is helpful for the improvement of the sputter deposition stability, understanding the physical mechanism of growth and degradation course, and improving the service life and spectral regulatory capacity.

英文关键词： Silver film；Optical Constant；Alloy film；Durability；