常温下高灵敏度SPR氮氧化物微量气体传感器研究

项目名称： 常温下高灵敏度SPR氮氧化物微量气体传感器研究

项目编号： No.61203211

项目类型： 青年科学基金项目

立项/批准年度： 2013

项目学科： 自动化学科

项目作者： 郑改革

作者单位： 南京信息工程大学

项目金额： 26万元

中文摘要： 表面等离子体共振(SPR)技术用于提高气体传感系统的灵敏度已成为研究热点，但在如何捕捉活跃气体分子与扩大表面等离子体波与气体分子的作用深度方面的相关机理尚未明确。本课题将卟啉对氮氧化物气体分子的强吸收、纳米二氧化钛多孔薄膜的气体渗透性和SPR对折射率的敏感性结合起来，利用Kretschmann棱镜耦合结构，设计并制备一种在常温下具有较高灵敏度的SPR低浓度氮氧化物气体传感器。理论方面，严格求解麦克斯韦方程组，描绘表面等离子体波在复合纳米结构界面的产生、传播和衰减过程，得到光波在多层膜内的分布情况，进而分析入射角度、入射光波长、多孔膜厚度对共振反射谱的影响，重点是能量转移、低群速度、模式分裂等异常光学现象。实验方面，利用磁控溅射、溶胶凝胶方法制备出传感器芯片，将吸收、散射谱的测量同近场表征相结合，搭建面向目标分子的气敏性实验装置，完成验证性测量并实现室温下角度灵敏度达到400o/RIU。

中文关键词： 表面等离子体共振；气体传感器；多孔氧化锌薄膜；二氧化钛纳米薄膜；

英文摘要： Recently, surface plasmon resonance(SPR) technology has attracted intensive interest due to its potential application in the enhancement of the sensitivity of gas sensors. However, the mechanisms to capture active gas molecules and to expand the interaction distance between surface plasmon waves (SPWs) and gas molecules have not been fully investigated. The overall aim of the proposed research is to design and fabricate a novel optical SPR gas sensor based on Kretschmann prism with a high sensitivity, which is able to operate at room temperature. The advantages of the sensor are based on the absorbance at visible spectra of porphyrin molecules with adsorption of nitrogen oxide compounds, the gas permeability of porous titanium dioxide (TiO2) thin films and the sensitivity of SPR to the change of the refractive index. Maxwell equations will be exactly solved to describe the process of the generation, propagation and decay of SPW on the interface of the hybrid nanostructures. Distribution of the electromagnetic field in the hybrid system will be then obtained. Furthermore, the influence of incident angle and wavelength of inputting light, thickness of porous thin film on the resonant reflection spectrum will be analyzed, especially in some unusual optical phenomena such as energy transfer, slow group velocity, and

英文关键词： Surface plasmon resonance；Gas sensor；Porous ZnO film；TiO2 thin film；