表面等离激元共振技术提高AlGaN基紫外LED发光效率研究

项目名称： 表面等离激元共振技术提高AlGaN基紫外LED发光效率研究

项目编号： No.61204053

项目类型： 青年科学基金项目

立项/批准年度： 2013

项目学科： 信息四处

项目作者： 孙莉莉

作者单位： 中国科学院半导体研究所

项目金额： 28万元

中文摘要： AlGaN基紫外LED因在激发白光、生化探测等领域的巨大应用前景而备受关注。但是，普遍较低的发光效率是紫外LED研究的瓶颈问题。本项目拟首次通过金属等离激元共振技术提高AlGaN基紫外LED的发光效率：第一，通过首次针对AlGaN材料体系紫外波段金属表面等离激元技术的基础问题开展系统研究，设计可有效增强紫外至深紫外波段紫外发光的金属/介质纳米材料系统，揭示此系统与AlGaN量子阱的物理耦合机制，并得到此系统的工艺制备窗口；第二，首次通过对倒装结构和垂直结构LED器件集成工艺进行设计，将金属/介质纳米材料系统集成到LED器件中，将波长为290nm以下的紫外LED的光功率提高到2.5毫瓦以上；第三，首次对采用表面等离激元共振技术的紫外LED的其它性质（可靠性、大电流注入下效率下降效应等）开展研究，全面评价这种技术在AlGaN基紫外LED器件的应用前景。

中文关键词： 紫外LED；AlGaN 基；发光效率；表面等离激元；

英文摘要： AlGaN based UV-LED has attracted much attention due to the potential applications in white light stimulation, biochemical detection, and so on. However, low efficiency is the bottleneck for UV-LED. In this project, for the first time, we improve the efficiency of AlGaN based UV-LED by surface plasmon resonance (SPR) technology. First, through fundamental study, design metal/dielectric nano-material system that can enhance the light emission with wavelength ranging from ultraviolet to deep ultraviolet, reveal the physical coupling mechanism between nano-material systems and AlGaN based quantum wells, and get the fabrication process window for nano-material systems. Second, improve the efficiency of UV-LED with wavelength below 290 nm to above 2.5 mW by SPR technology through the design of fabrication process for the first time. Third, study the other properties of UV LED adopting SPR technology (reliability and efficiency droop) for the first time, to evaluate prospect of this technology in the field of AlGaN based UV-LED.

英文关键词： UV-LED；AlGaN-based；luminous efficiency;；surface plasmon-polar；