锗硅/硅异质结电光调制器的研究

项目名称： 锗硅/硅异质结电光调制器的研究

项目编号： No.61204080

项目类型： 青年科学基金项目

立项/批准年度： 2013

项目学科： 信息四处

项目作者： 冯松

作者单位： 西安工程大学

项目金额： 28万元

中文摘要： 集成电路中传统的电互连正面临传输的瓶颈，以光互连代替电互连将是今后的一大发展趋势。高速大规模光集成电路要求电光调制器对光信号具有高速、低功耗的处理能力。传统硅电光调制器中波导区载流子浓度与反向抽取时间是一对不可解决的矛盾。本项目拟结合锗硅材料自身的高折射率、高迁移率等众多优点，设计出一种新型结构的锗硅/硅异质结电光调制器。它的工艺相对简单，特性优良，通过解决电光调制器中波导区载流子浓度与反向抽取时间的矛盾，可以获得高速、低功耗的优良特性，使其各项性能指标均优于常规的硅电光调制器。对锗硅/硅异质结电光调制器的理论进行深入研究，设计出简便易行可靠的工艺流程和实施方案。该项目研究成功将大大提高电光调制器的速度，降低其功耗，改善光集成电路的频率和功耗，有利于光集成电路的小型化和集成化，从而使光集成电路能早日替代电集成电路，对缓解能源危机也具有重要意义。

中文关键词： 电光调制器；锗硅；模型；注入效率；调制电压

英文摘要： Conventional electrical interconnection is facing transmission bottlenecks in integrated circuits, electrical interconnection is replaced by optical interconnection, that will be a major trend in the future. High-speed large-scale optical integrated circuit requires high-speed low-power electro-optic modulator with optical signal. The carrier concentration and reverse extraction time of the waveguide region is a pair of unsolvable contradictions in the traditional silicon electro-optic modulator. This project intends to combine the many advantages of silicon-germanium materials with the high refractive index, high mobility, and so on, and design a new structure of the SiGe/Si heterostructure electro-optic modulator. It has a relatively simple process and excellent features, by solving the contradictions of carrier concentration and reverse extraction time of the waveguide region in electro-optic modulator, the excellent characteristics of electro-optic modulator with high-speed and low power consumption can be got, and the performance indicators are superior to conventional silicon electro-optic modulator. Based on researching on SiGe/Si heterojunction theory of electro-optic modulator deeply, a simple and reliable process and implementing scheme are designed. The researching success of this project will greatly

英文关键词： electro-optic modulator；SiGe；model；injection efficiency；modulation voltage