基于三维硅基微纳结构的超级电容器的研究

项目名称： 基于三维硅基微纳结构的超级电容器的研究

项目编号： No.51275511

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 机械、仪表工业

项目作者： 沈文江

作者单位： 中国科学院苏州纳米技术与纳米仿生研究所

项目金额： 80万元

中文摘要： 电化学超级电容器有很高的功率密度和很长的循环寿命，但是其储能密度不到锂离子电池的1/10，低的能量密度极大限制了超级电容器的应用范围。 过渡金属氧化物，例如MnO2作为超级电容器的电极材料，价格便宜，无毒性，同时又有很高的理论能量密度。 但是由于金属氧化物的的低导电率限制了离子交换的速度和深度，有效储能材料只是在表面和表面以下几百纳米处，这种情况导致应用传统工艺制备的MnO2超级电容器时，有效的储能材料的体积占总体积1%以下，极大限制了过渡金属氧化物的实际应用。本项目从超级电容器的构架角度入手，采用MEMS加工和纳米加工工艺，高效稳定地制备具有高比表面积的正负极电极结构。在这有极大比表面积的电极结构上沉积过渡金属氧化物薄膜材料，能够使有效储能材料的体积占整体体积的20%以上，从而达到提高器件储能密度的目的。同时三维的微纳结构组成一个电流的传输网络，极大降低器件的内阻，保证了器件大功率的特点

中文关键词： 微型超级电容器；微纳机电系统；过渡金属氧化物；储能；

英文摘要： Electrochemical Supercapacitors can provide high power density and offer long operating cycle time. But their low energy storage density limits their applications in many important fields. Transition-metal oxides, such as MnO2, are promising materials used as electrode materials in supercapacitors because they provide very high theoretical charge storage density, they are not expensive and they are not environmental harmful. However, because of the poor conductivity of transition-metal oxides, the diffusion of ions to the bulk materials is limited. So the pseudocapacitive redox reaction only happens at very thin materials from the surface. A small fraction of transition-metal, usually less than 1%, is actively involved in real redox reaction if the traditional manufacturing process is used to make supercapacitors, which limits the practical applications for transition-metal supercapacitors. This project will use MEMS and nanotechnology to modify the architecture of supercapacitors. Several steps of Micro and Nano fabrication will be performed on a silicon substrate to form three dimensional positive and negative electrode structures with very high surface area to volume ratio. These electrode structures with high surface area will provide a platform to increase the volume ratio of active electrode materials to

英文关键词： micro-supercapacitor device；Micro/Nano electromechanical eystem；Transition metal oxides；Energy storage；