ICF靶装配参数多自由度测量方法研究

项目名称： ICF靶装配参数多自由度测量方法研究

项目编号： No.U1530106

项目类型： 联合基金项目

立项/批准年度： 2016

项目学科： 数理科学和化学

项目作者： 赵学森

作者单位： 哈尔滨工业大学

项目金额： 63万元

中文摘要： 针对ICF制靶过程中，迫切需要高精度检测ICF靶装配参数这一背景需求，从测量传感器、精密多自由度运动平台以及典型靶装配参数误差表征与评价等方面入手开展测量新方法研究，旨在为ICF靶装配参数的多自由度高精度检测难题探索行之有效的技术途径。研究包括：1) 新型大位移高精度微力传感器的设计制造、控制策略研究以及其精度校准；2) 靶多自由度姿态精密调整新平台建立、空间位置关系检测补偿以及测量路径规划研究；3) 典型靶装配参量的测量实验、建模、综合误差评价方法及表征技术研究。本课题的完成可为ICF靶装配参数高精度测量提供新原理、新方法和新装备，具有重要的理论意义和良好的应用前景。

中文关键词： ICF靶；装配参数测量；微力传感器；多自由度

英文摘要： The precision measurement of ICF target assembly parameters is an urgent requirement for the ICF target fabrication process. This project will provide a novel measuring method including the measurement sensor design, precision multi-degree of freedom motion platform establishment and the error characterization and evaluation method of target assembly parameters and other aspects, in order to explore an effective way for the multi-DOF precision detection of ICF target assembly parameters. The detail contents of this study include: 1) Design and manufacture of a new high-precision micro-force sensor with a large moving range, and study its control strategy and precision calibration procedure. 2) Develop a new multi-DOF precision target posture adjustment platform, investigate the spatial position relationship between the multi axis and the error compensation and measurement path planning. 3) Carry out measurement experiments, modeling, and study the integrated error evaluation method and characterization technique of typical target assembly parameters. Completion of the project can provide new principle, new method and new equipment for high-precision measurement of ICF target assembly parameters, owning important theoretical significance and good application prospects.

英文关键词： ICF target;assembly parameter measurement;micro-force sensor;multi-degree-of-freedom