SP调制的底部光栅长波/甚长波双色QWIP研究

项目名称： SP调制的底部光栅长波/甚长波双色QWIP研究

项目编号： No.U1304608

项目类型： 联合基金项目

立项/批准年度： 2014

项目学科： 无线电电子学、电信技术

项目作者： 王国东

作者单位： 河南理工大学

项目金额： 30万元

中文摘要： 针对双色QWIPFPA顶部光栅耦合效率较低的问题，提出表面等离激元(SP)调制的底部光栅耦合层结构，实现长波/甚长波双色的同时高效率耦合。为此，拟首先在GaAs衬底上制备二维周期性金属光栅耦合层，然后在光栅表面生长长波/甚长波双色有源区，并实现双色单元器件及16×16小规格面阵的制备。主要研究内容包括：(1)SP效应对双色有源区内光场的调制机理及光栅参数的最优设计；(2)长波/甚长波双色叠层有源区的设计与实现；(3)高均匀性光栅结构的工艺实现；(4)金属-半导体周期性界面上有源区的生长机理。与传统顶部光栅相比，底部光栅实现了光栅耦合层与光敏元电极的分离，保持了光栅的完整，避免了光敏单元尺寸减小导致的光栅耦合效率降低；可望在降低面阵制备工艺复杂度的同时，大幅提高QWIP器件的光电流。项目研究有助于提高双色QWIP的探测率，为高灵敏度大规格双色QWIPFPA 的实现奠定基础。

中文关键词： 量子阱红外探测器；表面等离激元；太赫兹探测器；底部光栅；

英文摘要： The bottom coupling grating structure (BCGS) is proposed based on the surface Plasmon(SP) due to low coupling efficiency of top grating in dual color QWIP FPA. The object for this research is to improve coupling efficiency of positive incident light and to realize the high coupling efficiency of Long-/very long-wavelength dual-color. Therefore, firstly, the 2D metal grating will be fabricated on GaAs substrate. Secondly, the dual-color active region will be growth on the metal-semiconductor periodic interface. At last the dual-color unit device and 16 ×16 small size array device will be made. The main contents should be included four aspects. Firstly the characteristic of optical field distribution under the SP effect and the optimization parameter design of dual-color bottom grating will be studied. Secondly, the long-/very long- dual color active region will be designed and fabricated. Thirdly, the investigation about main characteristic of the BCGS will be studied through the optimal fabrication process of large area, high uniform grating coupling layer.At last, the growth mechanism of active region on metal-semiconductor interface will be studied. Comparing with traditional top grating, theadvantages of BCGS are that the separation of coupling layer and the photosensitive element electrode will be realized,

英文关键词： quantum well infrared detector；surface plasmon；Terahertz quantum well photodetector；Bottom grating；