面向半导体制造的生产组织与设备维护安排联合优化问题研究

项目名称： 面向半导体制造的生产组织与设备维护安排联合优化问题研究

项目编号： No.71472125

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 管理科学

项目作者： 王丽亚

作者单位： 上海交通大学

项目金额： 62万元

中文摘要： 半导体制造过程的复杂性和设备的昂贵使得其生产组织和设备维护安排成为非常重要的活动，现有的企业大都采用由生产部门和设备部门各自安排的方法，并未考虑生产组织和设备维护安排之间具有相互作用相互影响的关系，导致无论是生产组织还是设备维护安排都缺乏整体优化，甚至在实际操作中往往发生冲突而缺乏可行性，或设备过度维护或维护不足，或生产任务不能按计划完成，这些问题已成为目前严重影响企业竞争力的关键之一。本项目选择生产组织和设备维护安排的主要环节：计划与调度，针对半导体制造具有的典型特点，研究面向半导体制造的生产计划与设备维护计划的联合优化问题，以及生产作业与设备维护作业联合调度优化问题。通过研究半导体制造中生产组织和设备维护安排的相互作用和相互影响关系，找到影响的要素，对联合优化问题建模并设计出相应的求解方法。提出一套面向半导体制造的生产组织和设备维护安排联合优化的理论和方法为企业解决该类问题提供指导。

中文关键词： 半导体制造；生产计划与调度；设备维护计划与调度；联合优化

英文摘要： Both production and maintenance arrangement are very important activities in semiconductor manufacturing area, due to the complexity of the semiconductor manufacturing process and the high cost of the equipments utilized. Existing methods are that the production and the maintenance arrangements are separately made by different departments of an enterprise without considering the fact that there actually are significant interactions between them. The arrangements can not to be global optimization by the methods, and even lead to the conflicts between them and infeasibility of arrangements in practical execution. And also equipments are often maintained either overly or insufficiently, while production tasks may not be completed on time in accordance with the predetermined plan. Nowadays the above mentioned problems has severely weaken the competitiveness of many semiconductor manufacturing enterprises. Based on the analysis hereinbefore, and the fact that planning and scheduling are most critical to both production and maintenance arrangement, this propose aims to study the joint optimization of production planning and maintenance planning of semiconductor manufacturing, and the joint optimization of production scheduling and maintenance scheduling, while considering the characteristics of the semiconductor manufacturing process. We intend to build models for these two joint optimization problems based on deeply research into the relationship and interaction between production and maintenance arrangement. Additionally ,we will seek to develop effective and efficient solution techniques for both of these two problems. In summary, our project will provide a series of theories and techniques with respect to the joint optimization of production organization and maintenance arrangement while considering the particular complexity of the semiconductor manufacturing process, so as to provide guidance and means for the semiconductor manufacturing enterprises to solve the problems mentioned above.

英文关键词： semiconductor manufacturing;production planning and scheduling;maintenance planning and scheduling;joint optimization