纳米草修饰微孔或凸包阵列的分级织构化光学薄膜研究

项目名称： 纳米草修饰微孔或凸包阵列的分级织构化光学薄膜研究

项目编号： No.51205001

项目类型： 青年科学基金项目

立项/批准年度： 2013

项目学科： 机械工程学科

项目作者： 黄仲佳

作者单位： 安徽工程大学

项目金额： 25万元

中文摘要： 透明导电氧化物薄膜是硅基太阳能电池必不可少的电极材料，其要求具有良好的陷光效果。表面织构化是提高薄膜陷光效果的主要方法之一，采用湿化学刻蚀获得的织构可以提高掺铝氧化锌(AZO)薄膜的陷光效果，但湿化学刻蚀法存在薄膜孔洞化及织构形貌、尺寸不均匀等"瓶颈"问题，制约薄膜光学性能的进一步提高。本项目拟将激光织构和ZnO纳米草结构相结合，以激光刻蚀的微孔或凸包阵列为第一级织构，在其表面生长"纳米草"结构作为第二级织构；构建纳米草修饰微孔或凸包阵列的"分级织构"；研究纳米草结构对激光织构单元体的形貌、尺寸的影响，研究纳米草结构对激光织构整体形貌、均方根粗糙度、比表面积的影响；研究分级织构对薄膜陷光特性的影响规律和机制，为透明导电氧化物光学薄膜的研究提供理论依据和技术支持。

中文关键词： 仿生表面结构；分级织构；光学性能；光伏效率；光学机理

英文摘要： Transparent conducting oxides (TCOs) films are prerequisite electrode for silicon solar cells.It require a highly efficient light trapping. Surface texturing is one of the main means of improving the light trapping effects of films.The suface texture obtained by wet chemical etching can improve the light trapping effects of aluminum doped zinc oxide (AZO) films. The "bottle-neck" of wet-chemical etching film, such as the presence of deep craters and/or holes, variable in texture size and shape, hinder the improvement of light trapping effects.The main objectives of this project are to combine laser texture with nanostructures. The pore or asperity arrays of the first-hierarchy texture would be prepared using pulse laser. Fabrication of the secand-hierarchy texture using ZnO nanograss decorated laser texture.The effect of nanograss structure on morphology and size of laser texture monomer would be investigated. The effect of nanograss structure on holistic morphology of laser texturing,Root Mean Square surface roughness and specific surface area would be researched.The rules and effect of hierarchical texture on the light trapping effects would be analyzed.The execution of this objectives would provide theoretical basis and technical support for the study of TCOs films.

英文关键词： Bionic surface structure；Hierarchical texture；Optical property；Photovoltaic efficiency；Optical mechanism