基于SWNTs/MOF微结构气味检测芯片的敏感机理基础研究

项目名称： 基于SWNTs/MOF微结构气味检测芯片的敏感机理基础研究

项目编号： No.51275491

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 机械、仪表工业

项目作者： 刘文怡

作者单位： 中北大学

项目金额： 80万元

中文摘要： 如何解决现有气敏传感器阵列中的个体存在响应特性漂移不一致、灵敏度有待提高及工作温度较高等问题，一直是研究者致力的目标。单层纳米碳管因其半导体特性而备受关注，将其与金属氧化物薄膜结合起来作为气味检测芯片的敏感单元，既提高灵敏度，又有效降低工作温度。本课题旨在研究基于单层纳米碳管和金属氧化物薄膜于一体的微结构气体检测芯片。深入开展高灵敏性的纳米结构的研究和加工工艺研究，研究电弧加工和溅射技术，研究薄膜结构对灵敏度的影响、微集成技术、封装技术及检测技术等，为实现气敏传感器的微型化、集成化与批量生产奠定基础。本课题所涉及到的研究在我国的工农业、民用、灾害防治、环境保护、医疗、安全等诸多领域有着巨大的应用前景。

中文关键词： 单层纳米碳管；金属氧化物薄膜；气味检测；敏感机理；陈列式微结构

英文摘要： How to solve the problem of individual existence in the existing gas sensor array response characteristics drift inconsistent, and make it lower operating temperature and better sensitivity, has been committed to the goal for researchers. Single-walled carbon nanotubes have attracted much attention for its semiconductor properties. Combine it with the metal oxide film as the sensitive odor detection chip unit, not only improve the sensitivity, but also reduce the operating temperature effectively. The topic purpose of studying is making one microstructure odour detection chip based on single- walled nanometer nanotubes and the metal oxide compound thin film in a body. We will develop the research on the high sensitive nanometer structure thoroughly, study the processing craft such as the electric arc processing and sputtering technology deeply, discuss the effect of the sensitivity caused by the thin film structure,the integration technology,the encapsulation technology and the testing technology,etc .The research will lay the foundation to realize the miniaturization and the integration of odour sensors and the batch production. This topic involved research in our industry and agriculture, civil, disaster prevention, environmental protection, medical care, security, and many other areas have great application p

英文关键词： single-walled carbon nanotubes；metal oxide film；odour detection；sensitive mechanization；micro-struture array