远红外电荷敏感型探测器的材料生长与器件研制

项目名称： 远红外电荷敏感型探测器的材料生长与器件研制

项目编号： No.61475178

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 无线电电子学、电信技术

项目作者： 康亭亭

作者单位： 中国科学院上海技术物理研究所

项目金额： 85万元

中文摘要： 与可见和近红外波段不同，在远红外波段(波长大于10微米)，由于单个光子的能量很小，实现单光子探测是不易的。现在仍主要利用半导体量子器件。基于双量子阱结构的电荷敏感型红外探测器CSIP就是其中的一种。实验上发现CSIP探测器性能随着响应波长变长有明显的降低。因此，在大于20微米波段，制作有光响应的CSIP探测器仍然是很难的。其背后的物理机制仍然不是很清楚，而问题的核心在于获得满足高质量的外延片。 本课题致力于GaAs/AlGaAs体系的长波长CSIP探测器的材料生长，器件制作和测量。我们将利用分子束外延开展CSIP探测器的材料生长，并根据器件的测量结果的反馈来开展研究。本课题的重点将集中于研究CSIP探测器的失效机制及其解决方法，特别是在更长波段下。并探索简单实用的外延片生长工艺。在此基础上，研制响应波长大于20微米的CSIP探测器。

中文关键词： 半导体薄膜；分子束外延；红外探测器；单光子探测

英文摘要： Different from visible and near-infrared wavelength region, the energy of a single photon in mid-infrared and far-infrared (wavelength λ>10μm) region is so small and the single-photon detection for λ>10μm is no longer an easy task. Hence, only semiconductor quantum devices are the mature single-photon detectors available for λ>10μm. The CSIP (charge-sensitive infrared phototransistors) detector fabricated on double quantum wells(DQW) is one such detector. According to the experimental reports, with the increase of target wavelength, the device performance of CSIP detector significantly decreases. As a result, it is difficult to get a CSIP detector with photon-response for λ>20μm. The physical mechanisms behind this dilemma are not very clear. And the core issue is to get high quality GaAs/AlGaAs wafer. This research is devoted to the growth, fabrication and measurement of GaAs/AlGaAs based far-infrared CSIP detector. We use MBE(Molecular Beam Epitaxy) to do the material growth with the fed-back from devices measurements. The emphasis will be placed on the studying of failure mechanisms in CSIP and the ways to relieve them, especially for long wavelength CSIP. At the same time, we are interested in finding a simple and reliable procedure to grow high quality epilayer. Based on these results, we will try to demonstrate the GaAs/AlGaAs CSIP detectors with response wavelength larger than 20μm.

英文关键词： semiconductor film;molecular beam epitaxy;infrared detector;single photon detection