微流控光学变焦透镜阵列集成芯片的研制

项目名称： 微流控光学变焦透镜阵列集成芯片的研制

项目编号： No.60878037

项目类型： 面上项目

立项/批准年度： 2009

项目学科： 金属学与金属工艺

项目作者： 梁忠诚

作者单位： 南京邮电大学

项目金额： 25万元

中文摘要： 微透镜阵列器件可广泛应用于光通信、光成像、光存储、光显示、光处理等领域。课题目标是研制一种自主创新的微流控光学变焦透镜阵列器件。研究内容包括：微流控光学变焦透镜阵列器件的参数设计、制作工艺、性能检测、机理分析及初步应用。项目的特色是将微流控技术与光信息技术相结合，制作电控调谐液体光学变焦透镜阵列器件。项目解决的关键技术是：液体透镜阵列内芯芯片的制作，绝缘介质层的涂覆，液体的灌注与器件的封装。项目按照预定的计划完成了任务书确定的研究目标：（一）研制成功了直径分别为1mm、4mm、8mm和12mm的电控液体单变焦透镜器件；（二）研制成功了37孔金属内芯、91孔金属内芯、91孔导电硅橡胶内芯的电控液体变焦透镜阵列器件；（三）基于介质上电润湿效应（EWOD）的液体变焦透镜机理研究取得进展；（四）新型可控流体介质-离子液体的输运机理和电润湿特性研究取得进展；（五）扩展了微流控光学技术在光开关、光衰减器和光学检测等方面的应用技术研究。 发表学术论文42篇（SCI检索11篇，EI检索22篇），申请发明专利29项（已获授权11项），培养研究生9名，超额完成了预期计划。

中文关键词： 微流控光学；透镜阵列；液体变焦透镜；电润湿效应；离子液体

英文摘要： Micro-lens array is a two-dimensional integrated device, which is widely used in optical communications, imaging, storage, display, processing and other optoelectronic applications. This project goal is to develop one kind of optofluidic variable-focus lens array device. The research contents include the parameter design, the manufacture technics, the performance testing, the mechanism analysis and the preliminary application for the optofluidic variable-focus lens array. The feature of this project is the making of electric-tuning variable-focus lens array device combining microfluidics with the optical information technology. The key technologies of the project are lens array chip-making, dielectric layers coating, liquid filling and device packaging. The aims of this project have been completed according to scheduled plan: (1) The devices of electric-tuning variable-focus liquid lens with diameters of 1mm, 4mm, 8mm and 12 mm are fabricated respectively; (2) Prototypes of variable-focus liquid lens array with 37 holes in metal-core, 91 holes in metal-core and 91 holes in conductive silicon rubber are developed respectively; (3) Progress is made in the investigation of the variable-focus liquid lens mechanism based on electro-wetting on dielectric (EWOD); (4) Headway is made in the studies of transport mechanism and EWOD property of the new controllable fluid medium, i.e. ionic liquids; (5) The optofluidics technology is expanded to the applications of optical switch and light attenuation device. 42 papers have been published, in which 11 papers have been indexed by SCI and 22 papers by EI database. 29 Chinese invention patent has been applied, in which 11 authorized by China Patent Bureau. 9 postgraduate students have been engaged in these researches. This project has been accomplished successfully.

英文关键词： optofluidics; lens array; variable-focus liquid lens; electro-wetting effect; ionic liquids