硬脆轴对称微结构表面的皮秒激光-超精密磨削链技术研究

项目名称： 硬脆轴对称微结构表面的皮秒激光-超精密磨削链技术研究

项目编号： No.51475109

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 机械、仪表工业

项目作者： 赵清亮

作者单位： 哈尔滨工业大学

项目金额： 85万元

中文摘要： 轴对称微结构表面光学功能元件以其小型轻量集成性好等特征在先进光学系统中得到日益广泛的应用，但是玻璃模压用超硬模芯的加工因工具磨损问题一直在限制其效率及精度的提高。本项目以碳化硅和碳化钨等典型玻璃模压用模芯硬脆材料为加工对象，以其轴对称微结构表面的高效高精度加工为目标，开展皮秒激光介入并协同超精密磨削的集成工艺链技术研究。通过分析皮秒激光及磨削工具作用下的多模式材料微观行为演变机制，建立起加工参量与被加工表面多维精度指标之间的内在关联。在突破该类元件传统磨削加工过程所存在的因工具磨损而影响加工效率与精度技术瓶颈基础上，完成典型元件的加工链工艺实验并提出过程参数的优化方案，从而为实现硬脆材料复杂微结构表面玻璃模压用模芯的高效率高精度制造提供理论依据并奠定技术基础。本项目的研究将拓展硬脆材料在微结构功能表面元件制造领域的应用范围，促进并提升硬脆及其它难加工材料的超精密加工技术水平。

中文关键词： 超精密磨削；光学制造；微细加工；误差补偿；超精密机床

英文摘要： Due to the superior properties in terms of light weight, miniaturization, integration to systems, the axis-symmetrical micro-structured optical functional elements have been widely applied in advanced optical systems. However, the tool wear problem in the diamond grinding process for the glass molding moulds has never been thoroughly solved, which always limits the improvement regarding the efficiency and accuracy and thus its optical performance. In aiming to solve this problem, this project firstly introduces pico-second laser as a pre-machining process featuring its high material removal rate and secondly, applies ultra-precision grinding as a final step machining featuring its deterministic high accuracy. Through this integrated pico-second laser and ultra-precision grinding processing chain, the Silicon Carbide(SiC)and Tungsten Carbide (WC) which are typical hard and brittle materials used as glass moulds, are investigated to machine with the axis-symmetrical micro-structured surfaces. Based on the fundamental study of the interactional mechanisms between the laser beam, grinding wheel and the materials, the micro-scaled material evolvement behavior in multi-modes is analyzed, then the mapping relationship between machining parameters and the multi-dimensional accuracies can be established. With the breakthrough of the bottle neck of grinding tool wear problem inhibiting the machining efficiency as well as the element accuracies, the processing parameters will be optimized according to the experiments of different typical workpieces. The research deliveries will no doubt present the theoretical and technological fundaments for the high efficiently and high precision machining hard and brittle axis-symmetrical micro-structured glass molding moulds. The study and research achievement of this proposed project will expand the application of hard and brittle materials in the field of the manufacturing field of micro-structured surface elements. Furthermore, the level of ultra-precision machining technology will be also accordingly promoted.

英文关键词： Ultraprecision Grinding;Optical Manufacturing;Micro-Fine Machining;Error Compensation;Ultraprecision Machine Tool