基于横向热收缩和纵向放大的深宽比增强热压印方法研究

项目名称： 基于横向热收缩和纵向放大的深宽比增强热压印方法研究

项目编号： No.51305420

项目类型： 青年科学基金项目

立项/批准年度： 2014

项目学科： 机械、仪表工业

项目作者： 朱学林

作者单位： 中国科学技术大学

项目金额： 26万元

中文摘要： 目前的"自上而下"微纳米加工技术对尺寸特征或者图形特征的改变一般采用工艺优化或者局部改进的方法，但这通常会对原有加工工艺提出了更高的要求或挑战。然而，若将热收缩聚合物的自发形变行为与原有的加工技术结合起来，可望从材料的角度对图形结构进一步重整和衍生，拓宽原有微纳加工的工艺范围，获取大深宽比结构，甚至得到通常难以获取的复杂微纳米图形结构。热压印作为聚合物的主要微细加工方法之一，与热收缩联用可以发挥其宽阔的加工能力。目前热压印与热收缩联用主要用来缩小横向尺寸，无法有效放大纵向的尺寸。本项目通过研究热收缩材料在热压印工艺以及热收缩过程中的材料形变行为规律，提出一种通用的纵向尺寸放大方法，并在此基础上发展基于横向热收缩和纵向放大的高宽比增强热压印新方法，实现对尺寸特征和图形结构的深加工，减小最小线宽、提高结构的深宽比、以及制作特殊形状的图形结构等，为微纳器件加工提供灵活、有效的新途径。

中文关键词： 热压印；纳米压印；热收缩聚合物；微加工；

英文摘要： Currently the main mechanism for the "Top-Down" micro and nano fabrication technologies is to transfer the mask pattern into final microstructures by various processes, such as UV lithography, dry etching, and etc. Thus any changes in the dimension and/or pattern end in new requirements on the process improvement and/or new chanlleges to the traditional fabrication methods. However, the in-situ materials deformation behavior promises to actively resize and/or reshape the original microstructures to enhance the fabrication abilities of traditional microfabrication, even achive complicate three dimensional structures. The hot embossing process is expected to combined with the heat shrinkable polymers due to its outstanding fabrication capacity. But the current combination is mainly used to reduce the lateral size with no amplification on the height. This project proposes a novel method for amplification the height by investigating the imprinting and shrinking behavior of shrinkable polymers. Then a low-cost, rapid, and alternative imprinting and shrinking technique based on the height amplification is developed to promise various advantages such reduced line width, enhanced aspect ratio, and complicated microstructures.

英文关键词： hot embossing；nano imprinting；heat shrinkable polymer；microfabrication；