基于氧化锌纳米棒的灵敏薄膜声表面波气体传感器的研究

项目名称： 基于氧化锌纳米棒的灵敏薄膜声表面波气体传感器的研究

项目编号： No.11304032

项目类型： 青年科学基金项目

立项/批准年度： 2014

项目学科： 数理科学和化学

项目作者： 郭袁俊

作者单位： 电子科技大学

项目金额： 30万元

中文摘要： 声表面波（SAW）气体传感器具有操作简单、响应时间快、灵敏度高、体积小等优点，尤其是具有无线传感的能力。为了让SAW 气体传感器更好的投入实际应用，还需要进行不断的研究，降低其制作成本、提高气体探测灵敏度和选择性等性能。本项目旨在把先进的薄膜声表面波技术和新颖的ZnO纳米棒材料结合起来，设计和制备出基于氧化锌纳米棒的灵敏薄膜SAW气体传感器，通过优化纳米棒的生长参数和对其进行表面掺杂改性，实现器件在室温下具有较高气体检测灵敏度和选择性，并且具有合适的制作成本。研究内容主要包括：制作ZnO薄膜声表面波器件；优化生长ZnO纳米棒；测试基于氧化锌纳米棒的薄膜SAW气体传感器的气体传感特性；对纳米棒进行表面掺杂改性，提高该气体传感器的灵敏度和选择性。本项目的研究，可为SAW气体传感器最终实现实际应用提供技术支撑，具有一定的学术价值和应用价值。

中文关键词： 声表面波；氧化锌纳米棒；掺杂；氨气；气体传感器

英文摘要： Surface acoustic wave (SAW) gas sensors have the combined advantages of simple operation, fast response time, high sensitivity, small size, and especially the ability for wireless or remote sensing. In order to make the SAW gas sensors put into better practical application, further study is required to reduce it cost, improve the sensitivity and selectivity of gas detection performance.This proposal is aiming to combine advanced thin film SAW technology and novel ZnO nanorods material，design and fabricate sensitive thin film SAW gas sensors based on ZnO nanorods, which have good sensitivity and selectivity performed at room temperature, as well as low cost by optimizing the growth parameters of nanorods and modifying its surface through doping. The research activities include: fabrication of ZnO thin film based SAW devices; optimized growth of ZnO nanorods; measurement of gas sensensing properties for thin film SAW gas sensors based on ZnO nanorods;and improvement of gas sensing sensitivity and selectivity by modifying the surface of nanarods through doping. This study can provide technique support for the final practical application of SAW gas sensors, and have some academic and practical value.

英文关键词： Surface acoustic wave；ZnO nanorods；doping；ammonia；gas sensors