基于动态刻划原理的三维微/纳结构加工新方法研究

项目名称： 基于动态刻划原理的三维微/纳结构加工新方法研究

项目编号： No.51275114

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 机械、仪表工业

项目作者： 胡振江

作者单位： 哈尔滨工业大学

项目金额： 80万元

中文摘要： 三维微/纳结构在微光学、激光惯性约束聚变点火工程等理论研究及重大工程应用领域都有着广泛的应用。然而由于三维微/纳结构的加工精度及尺度已达到纳米量级，如何加工这类结构面临新的挑战，因此亟需研究新原理的纳米加工方法。本项目提出开展基于AFM动态刻划原理的三维微/纳结构加工方法的研究。建立基于AFM动态刻划原理的纳米超声振动加工过程的理论模型，结合实验阐明振动探针去除纳米尺度材料的机制；建立面向多种工件材料，适合多种悬臂的加工检测一体化系统；解决采用该技术加工三维微/纳结构遇到的加工深度变化、工艺参数优化和三维加工工艺流程等关键问题，实现典型三维微/纳结构的加工。通过本课题的研究，将提供一个基于探针纳米振动原理的三维微纳结构新型加工方法及加工系统，并且将为建立纳米尺度振动切削理论奠定基础，具有重要的理论意义和良好的应用前景。

中文关键词： 原子力显微镜；动态刻划；三维微/纳结构；纳米加工；

英文摘要： Three-dimensional (3D) micro/nano structures have a wide range of applications in the theoretical research fields and major engineering applications, such as micro-optics, Inertial Confinement Fusion Ignition projects, etc. However, how to fabricate this kind of structure faces new challenges nowadays, as both the machining accuracy and the dimension of 3D micro/nano structures have already reached the nanometer scale. Therefore, there is an urgent need to develop nanofabrication methods with new principles. This project aims to study the ultrasonic nanomachining technique based on the AFM dynamic ploughing process. A theoretical model of this technique is established, and subsequently the materials removal mechanism is clarified in conjunction with experiments. The integrated system of processing and testing for a variety of workpiece materials and cantilevers is developed. Specific key issues, such as the effects of the variation in the machining depth on fabricating 3D micro/nano structures, the optimization of the machining parameters and the 3D processing procedure and so on, are solved. Finally, the typical 3D micro/nano structures can be successfully achieved by this technique. Through the research of these works, a novel nano machining method for processing 3D micro/nano structures based on a vibrating

英文关键词： Atomic Force Microscope；dynamic ploughing；three dimensional micro/nano structures；nano machining；