柔性衬底上室温生长高附着性能ZnO基透明导电膜研究

项目名称： 柔性衬底上室温生长高附着性能ZnO基透明导电膜研究

项目编号： No.51302021

项目类型： 青年科学基金项目

立项/批准年度： 2014

项目学科： 一般工业技术

项目作者： 龚丽

作者单位： 长沙理工大学

项目金额： 25万元

中文摘要： 电子器件的发展逐渐趋向柔性化，使得对柔性透明导电膜的需求日益迫切。ZnO作为一种新型宽带半导体，具有可见光透明、室温沉积、在氢等离子体中稳定等优点，成为制备透明导电膜的理想材料。薄膜柔性化通过使用有机衬底来实现，ZnO是无机材料，与有机衬底之间的性质差异较大，易导致两者之间的附着性不好，故高附着性能ZnO膜制备是亟待解决的科学难题。本项目以柔性ZnO基透明导电膜的附着性能为核心展开研究，采用磁控溅射法，以聚碳酸酩酯PC为柔性衬底，室温制备柔性ZnO基透明导电膜。通过各种测试手段表征ZnO膜与PC之间的界面特性，根据界面特性，采取针对性的衬底预处理技术及合适的缓冲层材料来协同提高薄膜的附着性能，与此同时，寻求薄膜附着性能和光电性能与生长工艺之间的关系，在获得优异附着性能的同时保证薄膜具有优异的光电性能，以达到器件的实际应用要求。本项目将促进柔性透明导电膜的发展，为柔性电子器件的应用提供基础。

中文关键词： 氧化锌；透明导电膜；柔性；附着性能；有机衬底

英文摘要： Transparent conductive films (TCFs) require more and more flexibility, because more and more electronic devices require flexibility. Zinc oxide (ZnO), as a novel direct wide-bandgap semiconductor, has merits of a high transparence in the visible region, a room-temperature deposition, and an excellent stability in H plasma, which is an ideal material for TCFs. The flexibility of thin films can come true by using organic substrates. However, ZnO, which is an inorganic material, has the very different properties with the organic substrate. And then it will induce the bad adhesive property between ZnO and organic substrates. So preparing ZnO thin films with excellent adhesive properties is an urgent problem. In this proposal, we will study adhesive properties of flexible ZnO-based TCFs. We will improve the adhesive property to meet the devices application. Flexible ZnO based transparent conductive films will be prepared on polycarbonate (PC) substrates at room temperature by magnetron sputtering. The interface properties between ZnO films and PC substrates will be characterized by all kinds of testing instruments. And then according to the interface properties, the adhesive properties will be improved by surface treatment of PC and buffer layer. The relationship between the adhesive, optical, electrical properties o

英文关键词： ZnO；Transparent conductive films；Flexibility；Adhesive property；Organic substrate